Abstract

The main goal of the work compiled in this thesis is to investigate thin films for integration in micro electromechanical systems (MEMS). The miniaturization of MEMS actuators and sensors without compromising their performance requires thin films of different active materials with specific properties. The properties of materials in thin film form differ from those in bulk, because of large surface to volume ratio, unique microstructure, constraints imposed by the substrate, etc. The work deals with easy to fabricate single crystal silicon micro cantilever structures and capacitors as test devices to explore material properties in the thin films domain. Cantilevers are deposited with the thin films under investigation and capacitors were formed by sandwiching the active material between top and bottom electrodes. Identification of the sources of error and their quantification and reduction increases the reliability and accuracy of our characterization methods.
Original languageUndefined
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Krijnen, Gijsbertus J.M., Supervisor
  • Elwenspoek, Michael Curt, Supervisor
  • Abelmann, Leon , Advisor
Sponsors
Date of Award20 Apr 2012
Place of PublicationEnschede
Print ISBNs978-90-365-3345-4
DOIs
StatePublished - 20 Apr 2012

Fingerprint

Thin films
MEMS
Capacitors
Materials properties
Actuators
Silicon
Microstructure
Electrodes
Sensors
Substrates

Keywords

  • TST-ACTUATORS
  • IR-80080
  • METIS-287897
  • EWI-21977

Cite this

Nazeer, H. (2012). Thin films on cantilevers Enschede DOI: 10.3990/1.9789036533454
Nazeer, H.. / Thin films on cantilevers. Enschede, 2012. 120 p.
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Nazeer, H 2012, 'Thin films on cantilevers', University of Twente, Enschede. DOI: 10.3990/1.9789036533454

Thin films on cantilevers. / Nazeer, H.

Enschede, 2012. 120 p.

Research output: ScientificPhD Thesis - Research UT, graduation UT

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Nazeer H. Thin films on cantilevers. Enschede, 2012. 120 p. Available from, DOI: 10.3990/1.9789036533454