Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

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    Abstract

    A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.
    Original languageUndefined
    Title of host publicationIEEE Sensors 2013
    Place of PublicationLos Alamitos, CA, USA
    PublisherIEEE
    Pages1-4
    Number of pages4
    ISBN (Print)978-1-4673-4642-9
    DOIs
    Publication statusPublished - 3 Nov 2013
    Event12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States
    Duration: 3 Nov 20136 Nov 2013
    Conference number: 12
    http://ieee-sensors2013.org/

    Publication series

    Name
    PublisherIEEE
    ISSN (Print)1930-0395

    Conference

    Conference12th IEEE Sensors 2013
    CountryUnited States
    CityBaltimore
    Period3/11/136/11/13
    Internet address

    Keywords

    • EWI-24355
    • METIS-302669
    • IR-89157

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