Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Robert Anton Brookhuis; Remco J. Wiegerink; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen

doi:10.1109/ICSENS.2013.6688398

Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Robert Anton Brookhuis, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

13 Citations (Scopus)

5 Downloads (Pure)

Abstract

A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

Original language	Undefined
Title of host publication	IEEE Sensors 2013
Place of Publication	Los Alamitos, CA, USA
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Print)	978-1-4673-4642-9
DOIs	https://doi.org/10.1109/ICSENS.2013.6688398
Publication status	Published - 3 Nov 2013
Event	12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States Duration: 3 Nov 2013 → 6 Nov 2013 Conference number: 12 http://ieee-sensors2013.org/

Publication series

Name
Publisher	IEEE
ISSN (Print)	1930-0395

Conference

Conference	12th IEEE Sensors 2013
Country/Territory	United States
City	Baltimore
Period	3/11/13 → 6/11/13
Internet address	http://ieee-sensors2013.org/

Keywords

EWI-24355
METIS-302669
IR-89157

Access to Document

10.1109/ICSENS.2013.6688398

http://eprints.eemcs.utwente.nl/secure2/24355/01/Sensors2013Robert.pdf

Cite this

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title = "Three-axial force sensor with capacitive read-out using a differential relaxation oscillator",

abstract = "A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.",

keywords = "EWI-24355, METIS-302669, IR-89157",

author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",

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AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 12

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N2 - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

AB - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

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KW - METIS-302669

KW - IR-89157

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DO - 10.1109/ICSENS.2013.6688398

M3 - Conference contribution

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Y2 - 3 November 2013 through 6 November 2013

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