Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    9 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.
    Original languageUndefined
    Title of host publicationIEEE Sensors 2013
    Place of PublicationLos Alamitos, CA, USA
    PublisherIEEE
    Pages1-4
    Number of pages4
    ISBN (Print)978-1-4673-4642-9
    DOIs
    Publication statusPublished - 3 Nov 2013
    Event12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States
    Duration: 3 Nov 20136 Nov 2013
    Conference number: 12
    http://ieee-sensors2013.org/

    Publication series

    Name
    PublisherIEEE
    ISSN (Print)1930-0395

    Conference

    Conference12th IEEE Sensors 2013
    CountryUnited States
    CityBaltimore
    Period3/11/136/11/13
    Internet address

    Keywords

    • EWI-24355
    • METIS-302669
    • IR-89157

    Cite this

    @inproceedings{f9becbd928884a23ad9ac10ee54c5c84,
    title = "Three-axial force sensor with capacitive read-out using a differential relaxation oscillator",
    abstract = "A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5{\%} of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.",
    keywords = "EWI-24355, METIS-302669, IR-89157",
    author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",
    note = "10.1109/ICSENS.2013.6688398",
    year = "2013",
    month = "11",
    day = "3",
    doi = "10.1109/ICSENS.2013.6688398",
    language = "Undefined",
    isbn = "978-1-4673-4642-9",
    publisher = "IEEE",
    pages = "1--4",
    booktitle = "IEEE Sensors 2013",
    address = "United States",

    }

    Three-axial force sensor with capacitive read-out using a differential relaxation oscillator. / Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.

    IEEE Sensors 2013. Los Alamitos, CA, USA : IEEE, 2013. p. 1-4.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

    AU - Brookhuis, Robert Anton

    AU - Wiegerink, Remco J.

    AU - Lammerink, Theodorus S.J.

    AU - Krijnen, Gijsbertus J.M.

    N1 - 10.1109/ICSENS.2013.6688398

    PY - 2013/11/3

    Y1 - 2013/11/3

    N2 - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

    AB - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

    KW - EWI-24355

    KW - METIS-302669

    KW - IR-89157

    U2 - 10.1109/ICSENS.2013.6688398

    DO - 10.1109/ICSENS.2013.6688398

    M3 - Conference contribution

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    BT - IEEE Sensors 2013

    PB - IEEE

    CY - Los Alamitos, CA, USA

    ER -