Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

9 Citations (Scopus)
1 Downloads (Pure)

Abstract

A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.
Original languageUndefined
Title of host publicationIEEE Sensors 2013
Place of PublicationLos Alamitos, CA, USA
PublisherIEEE
Pages1-4
Number of pages4
ISBN (Print)978-1-4673-4642-9
DOIs
Publication statusPublished - 3 Nov 2013
Event12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States
Duration: 3 Nov 20136 Nov 2013
Conference number: 12
http://ieee-sensors2013.org/

Publication series

Name
PublisherIEEE
ISSN (Print)1930-0395

Conference

Conference12th IEEE Sensors 2013
CountryUnited States
CityBaltimore
Period3/11/136/11/13
Internet address

Keywords

  • EWI-24355
  • METIS-302669
  • IR-89157

Cite this

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title = "Three-axial force sensor with capacitive read-out using a differential relaxation oscillator",
abstract = "A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5{\%} of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.",
keywords = "EWI-24355, METIS-302669, IR-89157",
author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",
note = "10.1109/ICSENS.2013.6688398",
year = "2013",
month = "11",
day = "3",
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language = "Undefined",
isbn = "978-1-4673-4642-9",
publisher = "IEEE",
pages = "1--4",
booktitle = "IEEE Sensors 2013",
address = "United States",

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Three-axial force sensor with capacitive read-out using a differential relaxation oscillator. / Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Krijnen, Gijsbertus J.M.

IEEE Sensors 2013. Los Alamitos, CA, USA : IEEE, 2013. p. 1-4.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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AU - Brookhuis, Robert Anton

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

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N2 - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

AB - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

KW - EWI-24355

KW - METIS-302669

KW - IR-89157

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M3 - Conference contribution

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