Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Robert Anton Brookhuis; Remco J. Wiegerink; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen

doi:10.1109/ICSENS.2013.6688398

Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

Robert Anton Brookhuis
, Remco J. Wiegerink
, Theodorus S.J. Lammerink
, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

13 Citations (Scopus)

5 Downloads (Pure)

Abstract

A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

Original language	Undefined
Title of host publication	IEEE Sensors 2013
Place of Publication	Los Alamitos, CA, USA
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Print)	978-1-4673-4642-9
DOIs	https://doi.org/10.1109/ICSENS.2013.6688398
Publication status	Published - 3 Nov 2013
Event	12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States Duration: 3 Nov 2013 → 6 Nov 2013 Conference number: 12 http://ieee-sensors2013.org/

Publication series

Name
Publisher	IEEE
ISSN (Print)	1930-0395

Conference

Conference	12th IEEE Sensors 2013
Country/Territory	United States
City	Baltimore
Period	3/11/13 → 6/11/13
Internet address	http://ieee-sensors2013.org/

Keywords

EWI-24355
METIS-302669
IR-89157

Access to Document

10.1109/ICSENS.2013.6688398

http://eprints.eemcs.utwente.nl/secure2/24355/01/Sensors2013Robert.pdf

Cite this

@inproceedings{f9becbd928884a23ad9ac10ee54c5c84,

title = "Three-axial force sensor with capacitive read-out using a differential relaxation oscillator",

abstract = "A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5\% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.",

keywords = "EWI-24355, METIS-302669, IR-89157",

author = "Brookhuis, \{Robert Anton\} and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and Krijnen, \{Gijsbertus J.M.\}",

note = "10.1109/ICSENS.2013.6688398 ; 12th IEEE Sensors 2013 ; Conference date: 03-11-2013 Through 06-11-2013",

year = "2013",

month = nov,

day = "3",

doi = "10.1109/ICSENS.2013.6688398",

language = "Undefined",

isbn = "978-1-4673-4642-9",

publisher = "IEEE",

pages = "1--4",

booktitle = "IEEE Sensors 2013",

address = "United States",

url = "http://ieee-sensors2013.org/",

}

TY - GEN

T1 - Three-axial force sensor with capacitive read-out using a differential relaxation oscillator

AU - Brookhuis, Robert Anton

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 12

PY - 2013/11/3

Y1 - 2013/11/3

N2 - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

AB - A silicon three-axis force sensor is designed and realized to be used for measurement of the interaction force between a human finger and the environment. To detect the force components, a capacitive read-out system using a novel relaxation oscillator has been developed with an output frequency proportional to differential capacitance. The sensor has a range of 2N in tangential- and normal force direction with an accuracy better than 1.5% of the full-scale. The sensor can be safely overloaded with a normal force of more than 30N.

KW - EWI-24355

KW - METIS-302669

KW - IR-89157

U2 - 10.1109/ICSENS.2013.6688398

DO - 10.1109/ICSENS.2013.6688398

M3 - Conference contribution

SN - 978-1-4673-4642-9

SP - 1

EP - 4

BT - IEEE Sensors 2013

PB - IEEE

CY - Los Alamitos, CA, USA

T2 - 12th IEEE Sensors 2013

Y2 - 3 November 2013 through 6 November 2013

ER -