Three-axis force-torque sensor with fully differential capacitive readout

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    We present a 3-axis force/torque sensor fabricated in a single SOI wafer. The sensor allows fully differential capacitive readout also for the normal force measurement, without the need for complicated lever mechanisms or wafer bonding. Fabrication is straightforward, with only two masks for deep reactive ion etching and one release etch. Furthermore, out-of-plane displacements are limited by the buried oxide layer thickness which allows for overload protection. The chip has a diameter of 5 mm, a normal force range of 1 N and a torque range from -4 to +4 Nmm and is designed for measuring the interaction forces involved in eye surgery.
    Original languageUndefined
    Title of host publication29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE
    Pages885-888
    Number of pages4
    ISBN (Print)978-1-5090-1973-1
    DOIs
    Publication statusPublished - 24 Jan 2016
    Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
    Duration: 24 Jan 201628 Jan 2016
    Conference number: 29

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
    Abbreviated titleMEMS
    CountryChina
    CityShanghai
    Period24/01/1628/01/16

    Keywords

    • EWI-27766
    • IR-103622
    • METIS-321732

    Cite this

    Brookhuis, R. A., Sanders, R. G. P., Sikkens, B. N. A., & Wiegerink, R. J. (2016). Three-axis force-torque sensor with fully differential capacitive readout. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 (pp. 885-888). Piscataway, NJ, USA: IEEE. https://doi.org/10.1109/MEMSYS.2016.7421772
    Brookhuis, Robert Anton ; Sanders, Remco G.P. ; Sikkens, Boudewijn N.A. ; Wiegerink, Remco J. / Three-axis force-torque sensor with fully differential capacitive readout. 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA : IEEE, 2016. pp. 885-888
    @inproceedings{9fe6af6131d14cb287db2dce92a30ac5,
    title = "Three-axis force-torque sensor with fully differential capacitive readout",
    abstract = "We present a 3-axis force/torque sensor fabricated in a single SOI wafer. The sensor allows fully differential capacitive readout also for the normal force measurement, without the need for complicated lever mechanisms or wafer bonding. Fabrication is straightforward, with only two masks for deep reactive ion etching and one release etch. Furthermore, out-of-plane displacements are limited by the buried oxide layer thickness which allows for overload protection. The chip has a diameter of 5 mm, a normal force range of 1 N and a torque range from -4 to +4 Nmm and is designed for measuring the interaction forces involved in eye surgery.",
    keywords = "EWI-27766, IR-103622, METIS-321732",
    author = "Brookhuis, {Robert Anton} and Sanders, {Remco G.P.} and Sikkens, {Boudewijn N.A.} and Wiegerink, {Remco J.}",
    note = "eemcs-eprint-27766",
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    publisher = "IEEE",
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    booktitle = "29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016",
    address = "United States",

    }

    Brookhuis, RA, Sanders, RGP, Sikkens, BNA & Wiegerink, RJ 2016, Three-axis force-torque sensor with fully differential capacitive readout. in 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. IEEE, Piscataway, NJ, USA, pp. 885-888, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421772

    Three-axis force-torque sensor with fully differential capacitive readout. / Brookhuis, Robert Anton; Sanders, Remco G.P.; Sikkens, Boudewijn N.A.; Wiegerink, Remco J.

    29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA : IEEE, 2016. p. 885-888.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    T1 - Three-axis force-torque sensor with fully differential capacitive readout

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    N1 - eemcs-eprint-27766

    PY - 2016/1/24

    Y1 - 2016/1/24

    N2 - We present a 3-axis force/torque sensor fabricated in a single SOI wafer. The sensor allows fully differential capacitive readout also for the normal force measurement, without the need for complicated lever mechanisms or wafer bonding. Fabrication is straightforward, with only two masks for deep reactive ion etching and one release etch. Furthermore, out-of-plane displacements are limited by the buried oxide layer thickness which allows for overload protection. The chip has a diameter of 5 mm, a normal force range of 1 N and a torque range from -4 to +4 Nmm and is designed for measuring the interaction forces involved in eye surgery.

    AB - We present a 3-axis force/torque sensor fabricated in a single SOI wafer. The sensor allows fully differential capacitive readout also for the normal force measurement, without the need for complicated lever mechanisms or wafer bonding. Fabrication is straightforward, with only two masks for deep reactive ion etching and one release etch. Furthermore, out-of-plane displacements are limited by the buried oxide layer thickness which allows for overload protection. The chip has a diameter of 5 mm, a normal force range of 1 N and a torque range from -4 to +4 Nmm and is designed for measuring the interaction forces involved in eye surgery.

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    Brookhuis RA, Sanders RGP, Sikkens BNA, Wiegerink RJ. Three-axis force-torque sensor with fully differential capacitive readout. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. Piscataway, NJ, USA: IEEE. 2016. p. 885-888 https://doi.org/10.1109/MEMSYS.2016.7421772