Three-dimensional IC's prolong the life of Moore's law

I. Brunets, A. Boogaard, I.G. Isai, Antonius A.I. Aarnink, Alexeij Y. Kovalgin, J. Holleman, Jurriaan Schmitz

    Research output: Contribution to conferencePaper

    Abstract

    In this work we make steps forwards developing a low-temperature technology intended for the fabrication of 3-D structures. Several technology steps like low-temperature deposition of semiconductor and dielectric thin films, laser crystallization and planarization are described and discussed regarding the process characterization.
    Original languageUndefined
    Pages76-78
    Number of pages3
    Publication statusPublished - Nov 2005
    Event8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005 - Veldhoven, Netherlands
    Duration: 17 Nov 200518 Nov 2005
    Conference number: 8

    Workshop

    Workshop8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period17/11/0518/11/05

    Keywords

    • IR-67715
    • EWI-15509
    • SC-CICC: Characterization of IC Components

    Cite this

    Brunets, I., Boogaard, A., Isai, I. G., Aarnink, A. A. I., Kovalgin, A. Y., Holleman, J., & Schmitz, J. (2005). Three-dimensional IC's prolong the life of Moore's law. 76-78. Paper presented at 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005, Veldhoven, Netherlands.