Three-dimensional sound intensity measurements using microflown particle velocity sensors

H.E. de Bree, W.F. Druyvesteyn, Johan W. Berenschot, Michael Curt Elwenspoek

  • 23 Citations

Abstract

This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.
Original languageUndefined
Title of host publicationProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages124-129
Number of pages6
ISBN (Print)0-7803-5194-0
DOIs
StatePublished - 17 Jan 1999
Event12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States

Publication series

Name
PublisherIEEE

Conference

Conference12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated titleMEMS
CountryUnited States
CityOrlando
Period17/01/9921/01/99

Fingerprint

sound intensity
microphones
probes
fabrication

Keywords

  • METIS-112717
  • EWI-13237
  • IR-15835

Cite this

de Bree, H. E., Druyvesteyn, W. F., Berenschot, J. W., & Elwenspoek, M. C. (1999). Three-dimensional sound intensity measurements using microflown particle velocity sensors. In Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS (pp. 124-129). Piscataway: IEEE Computer Society. DOI: 10.1109/MEMSYS.1999.746785

de Bree, H.E.; Druyvesteyn, W.F.; Berenschot, Johan W.; Elwenspoek, Michael Curt / Three-dimensional sound intensity measurements using microflown particle velocity sensors.

Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. Piscataway : IEEE Computer Society, 1999. p. 124-129.

Research output: Scientific - peer-reviewConference contribution

@inbook{c0cf229a21104175a6ec808f4969ca3c,
title = "Three-dimensional sound intensity measurements using microflown particle velocity sensors",
abstract = "This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.",
keywords = "METIS-112717, EWI-13237, IR-15835",
author = "{de Bree}, H.E. and W.F. Druyvesteyn and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt}",
year = "1999",
month = "1",
doi = "10.1109/MEMSYS.1999.746785",
isbn = "0-7803-5194-0",
publisher = "IEEE Computer Society",
pages = "124--129",
booktitle = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS",
address = "United States",

}

de Bree, HE, Druyvesteyn, WF, Berenschot, JW & Elwenspoek, MC 1999, Three-dimensional sound intensity measurements using microflown particle velocity sensors. in Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. IEEE Computer Society, Piscataway, pp. 124-129, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, United States, 17-21 January. DOI: 10.1109/MEMSYS.1999.746785

Three-dimensional sound intensity measurements using microflown particle velocity sensors. / de Bree, H.E.; Druyvesteyn, W.F.; Berenschot, Johan W.; Elwenspoek, Michael Curt.

Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. Piscataway : IEEE Computer Society, 1999. p. 124-129.

Research output: Scientific - peer-reviewConference contribution

TY - CHAP

T1 - Three-dimensional sound intensity measurements using microflown particle velocity sensors

AU - de Bree,H.E.

AU - Druyvesteyn,W.F.

AU - Berenschot,Johan W.

AU - Elwenspoek,Michael Curt

PY - 1999/1/17

Y1 - 1999/1/17

N2 - This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.

AB - This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.

KW - METIS-112717

KW - EWI-13237

KW - IR-15835

U2 - 10.1109/MEMSYS.1999.746785

DO - 10.1109/MEMSYS.1999.746785

M3 - Conference contribution

SN - 0-7803-5194-0

SP - 124

EP - 129

BT - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

PB - IEEE Computer Society

ER -

de Bree HE, Druyvesteyn WF, Berenschot JW, Elwenspoek MC. Three-dimensional sound intensity measurements using microflown particle velocity sensors. In Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE Computer Society. 1999. p. 124-129. Available from, DOI: 10.1109/MEMSYS.1999.746785