Three-dimensional sound intensity measurements using microflown particle velocity sensors

H.E. de Bree; W.F. Druyvesteyn; Johan W. Berenschot; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1999.746785

Three-dimensional sound intensity measurements using microflown particle velocity sensors

H.E. de Bree, W.F. Druyvesteyn, Johan W. Berenschot, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

31 Citations (Scopus)

417 Downloads (Pure)

Abstract

This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.

Original language	Undefined
Title of host publication	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
Place of Publication	Piscataway
Publisher	IEEE
Pages	124-129
Number of pages	6
ISBN (Print)	0-7803-5194-0
DOIs	https://doi.org/10.1109/MEMSYS.1999.746785
Publication status	Published - 17 Jan 1999
Event	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12

Publication series

Name
Publisher	IEEE

Conference

Conference	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated title	MEMS
Country/Territory	United States
City	Orlando
Period	17/01/99 → 21/01/99

Keywords

METIS-112717
EWI-13237
IR-15835

Access to Document

10.1109/MEMSYS.1999.746785

Cite this

@inproceedings{c0cf229a21104175a6ec808f4969ca3c,

title = "Three-dimensional sound intensity measurements using microflown particle velocity sensors",

abstract = "This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.",

keywords = "METIS-112717, EWI-13237, IR-15835",

author = "{de Bree}, H.E. and W.F. Druyvesteyn and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = jan,

day = "17",

doi = "10.1109/MEMSYS.1999.746785",

language = "Undefined",

isbn = "0-7803-5194-0",

publisher = "IEEE",

pages = "124--129",

booktitle = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS",

address = "United States",

note = "12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 ; Conference date: 17-01-1999 Through 21-01-1999",

}

de Bree, HE, Druyvesteyn, WF, Berenschot, JW & Elwenspoek, MC 1999, Three-dimensional sound intensity measurements using microflown particle velocity sensors. in Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. IEEE, Piscataway, pp. 124-129, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, Florida, United States, 17/01/99. https://doi.org/10.1109/MEMSYS.1999.746785

Three-dimensional sound intensity measurements using microflown particle velocity sensors. / de Bree, H.E.; Druyvesteyn, W.F.; Berenschot, Johan W. et al.
Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS. Piscataway: IEEE, 1999. p. 124-129.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Three-dimensional sound intensity measurements using microflown particle velocity sensors

AU - de Bree, H.E.

AU - Druyvesteyn, W.F.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 12

PY - 1999/1/17

Y1 - 1999/1/17

N2 - This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.

AB - This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.

KW - METIS-112717

KW - EWI-13237

KW - IR-15835

U2 - 10.1109/MEMSYS.1999.746785

DO - 10.1109/MEMSYS.1999.746785

M3 - Conference contribution

SN - 0-7803-5194-0

SP - 124

EP - 129

BT - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

PB - IEEE

CY - Piscataway

T2 - 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999

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