Three-dimensional sound intensity measurements using microflown particle velocity sensors

H.E. de Bree, W.F. Druyvesteyn, Johan W. Berenschot, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    25 Citations (Scopus)
    133 Downloads (Pure)

    Abstract

    This paper reports on a novel method to measure three-dimensional sound intensity and the fabrication of a miniature three-dimensional sound intensity probe. Verifying measurements where performed with three separate micro-machined particle velocity probes and one pressure microphone. A three-dimensional sound intensity probe has been realized based on a three-dimensional micro-machined particle velocity microphone, a 3D Microflown, and a miniature pressure microphone.
    Original languageUndefined
    Title of host publicationProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages124-129
    Number of pages6
    ISBN (Print)0-7803-5194-0
    DOIs
    Publication statusPublished - 17 Jan 1999
    Event12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States
    Duration: 17 Jan 199921 Jan 1999
    Conference number: 12

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
    Abbreviated titleMEMS
    CountryUnited States
    CityOrlando
    Period17/01/9921/01/99

    Keywords

    • METIS-112717
    • EWI-13237
    • IR-15835

    Cite this

    de Bree, H. E., Druyvesteyn, W. F., Berenschot, J. W., & Elwenspoek, M. C. (1999). Three-dimensional sound intensity measurements using microflown particle velocity sensors. In Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS (pp. 124-129). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.1999.746785