Three-dimensional structuring of sapphire by sequential He+ ion-beam implantation and wet chemical etching

A. Crunteanu, G. Jänchen, P. Hoffmann, Markus Pollnau, C. Buchal, A. Petraru, R.W. Eason, D.P. Shepherd

    Research output: Contribution to journalArticleAcademicpeer-review

    15 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Three-dimensional structuring of sapphire by sequential He+ ion-beam implantation and wet chemical etching'. Together they form a unique fingerprint.