Three-dimensional structuring of sapphire by sequential He+ ion-beam implantation and wet chemical etching

A. Crunteanu, G. Jänchen, P. Hoffmann, Markus Pollnau, C. Buchal, A. Petraru, R.W. Eason, D.P. Shepherd

    Research output: Contribution to journal › Article › Academic › peer-review

    17 Citations (Scopus)
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