Three-electrode discharge system for long-pulse high-power KrCl/KrF excimer lasers

L.C. Casper, Hubertus M.J. Bastiaens, P.J.M. Peters, Klaus J. Boller, R.M. Hofstra

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 16 Mar 2004
Event	16th NNV/CPS symposium voor Plasmafysica en Stralingstechnologie - Lunteren Duration: 16 Mar 2004 → 16 Mar 2004

Conference	16th NNV/CPS symposium voor Plasmafysica en Stralingstechnologie
City	Lunteren
Period	16/03/04 → 16/03/04

Keywords

@conference{16480932cc884bcbbac2411f7b03b105,

title = "Three-electrode discharge system for long-pulse high-power KrCl/KrF excimer lasers",

keywords = "METIS-219318",

author = "L.C. Casper and Bastiaens, {Hubertus M.J.} and P.J.M. Peters and Boller, {Klaus J.} and R.M. Hofstra",

year = "2004",

month = mar,

day = "16",

language = "Undefined",

pages = "--",

note = "16th NNV/CPS symposium voor Plasmafysica en Stralingstechnologie ; Conference date: 16-03-2004 Through 16-03-2004",

}

TY - CONF

T1 - Three-electrode discharge system for long-pulse high-power KrCl/KrF excimer lasers

AU - Casper, L.C.

AU - Bastiaens, Hubertus M.J.

AU - Peters, P.J.M.

AU - Boller, Klaus J.

AU - Hofstra, R.M.

PY - 2004/3/16

Y1 - 2004/3/16

KW - METIS-219318

M3 - Poster

SP - -

T2 - 16th NNV/CPS symposium voor Plasmafysica en Stralingstechnologie

Y2 - 16 March 2004 through 16 March 2004

ER -