Three novel integrated optical sensing structures for the chemical domain

Paul Lambeck, J. van Lith, Hugo Hoekstra

    Research output: Contribution to journalArticleAcademicpeer-review

    18 Citations (Scopus)

    Abstract

    The performance of three novel integrated optical sensing structures is explored theoretically. The basic structure is a strip-loaded waveguide in which the strip consists of a several nanometers thick sensitive material. An attractive option is to realize this strip as a monomolecular antibody layer making the sensor capable to monitor chemical concentrations. All sensing structures rely on measurand induced changes of the effective refractive index Neff are exploited. The potential of all sensing structures have been analyzed theoretically with a strong focus on obtaining good resolutions taking into account the effects of the imperfectness of the peripheral equipment. Resolutions expressed in terms of changes of the effective thickness in the range 10-3 -3 x 10-5 nm are expected to be feasible. Optical chips containing apart from the sensing structures also reference branches and fiber to chip couplings are discussed. A technological process for realizing the sensors in SiON technology is proposed.
    Original languageUndefined
    Pages (from-to)718-729
    Number of pages12
    JournalSensors and actuators. B: Chemical
    Volume113
    Issue number2
    DOIs
    Publication statusPublished - 27 Feb 2006

    Keywords

    • IOMS-SNS: SENSORS
    • METIS-230629
    • IR-55293
    • EWI-1674

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