Three Parasitic motion reduction strategies: Design principles - miniature flexure-based goniometer with minimised behaviour

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Abstract

Precise positioning systems often rely on flexure-based mechanisms, due to their high motion repeatability. However, limited stroke, limited load capacity and nonlinear geometric behaviour over the stroke (called parasitic motion) make the design of such mechanisms challenging. In this article, we demonstrate a small-scale goniometer based on a flexure-based guiding system with low parasitic motion. By stacking six trapezoidal flexure stages with an alternating orientation, the parasitic motion of the ‘face-up’ stages is counteracted by the ‘face-down’ stages, leading to a significant reduction in parasitic motion. This butterfly-like structure also reduces the deformation per flexure, allowing for a higher thickness with improved loadability and support stiffness. Furthermore, we show that linear actuator force induces deflection that compensates part of the parasitic motion.
Original languageEnglish
Pages (from-to)44-48
Number of pages5
JournalMikroniek
Volume64
Issue number4
Publication statusPublished - 2023

Keywords

  • 2024 OA procedure

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