Tiling the Silicon for Added Functionality: PLD Growth of Highly Crystalline STO and PZT on Graphene Oxide-Buffered Silicon Surface

Zoran Jovanović*, Urška Trstenjak, Hsin Chia Ho, Olena Butsyk, Binbin Chen, Elena Tchernychova, Fedir Borodavka, Gertjan Koster, Jiří Hlinka, Matjaž Spreitzer

*Corresponding author for this work

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The application of two-dimensional (2D) materials has alleviated a number of challenges of traditional epitaxy and pushed forward the integration of dissimilar materials. Besides acting as a seed layer for van der Waals epitaxy, the 2D materials─being atom(s) thick─have also enabled wetting transparency in which the potential field of the substrate, although partially screened, is still capable of imposing epitaxial overgrowth. One of the crucial steps in this technology is the preservation of the quality of 2D materials during and after their transfer to a substrate of interest. In the present study, we show that by honing the achievements of traditional epitaxy and wet chemistry a hybrid approach can be devised that offers a unique perspective for the integration of functional oxides with a silicon platform. It is based on SrO-assisted deoxidation and controllable coverage of silicon surface with a layer(s) of spin-coated graphene oxide, thus simultaneously allowing both direct and van der Waals epitaxy of SrTiO3 (STO). We were able to grow a high-quality STO pseudo-substrate suitable for further overgrowth of functional oxides, such as PbZr1-xTixO3 (PZT). Given that the quality of the films grown on a reduced graphene oxide-buffer layer was almost identical to that obtained on SiC-derived graphene, we believe that this approach may provide new routes for direct and “remote” epitaxy or layer-transfer techniques of dissimilar material systems.

Original languageEnglish
Pages (from-to)6058-6068
Number of pages11
JournalACS Applied Materials and Interfaces
Issue number4
Early online date18 Jan 2023
Publication statusPublished - 1 Feb 2023


  • added functionality
  • epitaxy
  • PLD deposition
  • PZT
  • rGO buffer layer
  • STO pseudo-substrate

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