Toward Annealing-Stable Molybdenum-Oxide-Based Hole-Selective Contacts For Silicon Photovoltaics

Stephanie Essig, Julie Dréon, Esteban Rucavado, Mathias Mews, Takashi Koida, Mathieu Boccard (Corresponding Author), Jérémie Werner, Jonas Geissbühler, Philipp Löper, Monica Morales-masis, Lars Korte, Stefaan De Wolf, Christophe Ballif

Research output: Contribution to journalArticleAcademicpeer-review

45 Citations (Scopus)


Molybdenum oxide (MoOX) combines a high work function with broadband optical transparency. Sandwiched between a hydrogenated intrinsic amorphous silicon passivation layer and a transparent conductive oxide, this material allows a highly efficient hole‐selective front contact stack for crystalline silicon solar cells. However, hole extraction from the Si wafer and transport through this stack degrades upon annealing at 190 °C, which is needed to cure the screen‐printed Ag metallization applied to typical Si solar cells. Here, we show that effusion of hydrogen from the adjacent layers is a likely cause for this degradation, highlighting the need for hydrogen‐lean passivation layers when using such metal‐oxide‐based carrier‐selective contacts. Pre‐MoOX‐deposition annealing of the passivating a‐Si:H layer is shown to be a straightforward approach to manufacturing MoOX‐based devices with high fill factors using screen‐printed metallization cured at 190 °C.
Original languageEnglish
Article number1700227
JournalSolar energy
Issue number4
Publication statusPublished - 1 Apr 2018
Externally publishedYes


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