Since their introduction in 1993 the class of covalently bound organic monolayers on oxide free silicon surfaces have found their way to multiple application fields such as passivation layers in solar cells, masking layers in lithographic processing, insulating films in hybrid moleculesilicon electronics, and memory devices. Furthermore, these monolayers can easily be functionalized with a large variety of receptor groups or sensing moieties, thereby forming a new promising material for incorporation in sensory devices such as FET based sensors. In this thesis an overview is given of the electrical and electrochemical characterization of silicon based devices, such as Metal-Insulator-Silicon (MIS) structures, lectrolyte-Insulator-Silicon (EIS) structures and the newly proposed Hybrid Organic Semiconductor FET (HOSFET), with either functionalized or unfunctionalized monolayers incorporated.
|Award date||16 Mar 2006|
|Place of Publication||Enschede|
|Publication status||Published - 16 Mar 2006|