Towards a Gas Independent Thermal Flow Meter

Shirin Azadi Kenari, Remco J. Wiegerink*, Joost C. Lötters*, Remco G.P. Sanders*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
99 Downloads (Pure)

Abstract

We present a novel potentially gas-independent thermal flow sensor chip that contains three two-wire calorimetric flow sensors to measure the flow profile and flow direction inside a tube, and a single-wire flow-independent thermal conductivity sensor which detects the type of the gas through a simple DC voltage measurement. All wires have the same dimensions of 2000 µm in length, 5 µm in width and 1.2 µm in thickness. Four different gases Ar, N 2 , Ne and He were used for the thermal conductivity measurement and the measured output voltage corresponds very well with a theoretical model.
Original languageEnglish
Title of host publication2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages767-770
Number of pages4
ISBN (Electronic)978-1-6654-9308-6
ISBN (Print)978-1-6654-9309-3
DOIs
Publication statusPublished - 1 Mar 2023

Publication series

NameIEEE International Conference on Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Volume2023
ISSN (Print)1084-6999
ISSN (Electronic)2160-1968

Keywords

  • MEMS
  • Thermal flow sensor
  • 2023 OA procedure

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