@inproceedings{eacbedbfd0014e1b84faac1af037a049,
title = "Towards a Gas Independent Thermal Flow Meter",
abstract = "We present a novel potentially gas-independent thermal flow sensor chip that contains three two-wire calorimetric flow sensors to measure the flow profile and flow direction inside a tube, and a single-wire flow-independent thermal conductivity sensor which detects the type of the gas through a simple DC voltage measurement. All wires have the same dimensions of 2000 µm in length, 5 µm in width and 1.2 µm in thickness. Four different gases Ar, N 2 , Ne and He were used for the thermal conductivity measurement and the measured output voltage corresponds very well with a theoretical model.",
keywords = "MEMS, Thermal flow sensor, 2023 OA procedure",
author = "{Azadi Kenari}, Shirin and Wiegerink, {Remco J.} and L{\"o}tters, {Joost C.} and Sanders, {Remco G.P.}",
year = "2023",
month = mar,
day = "1",
doi = "10.1109/MEMS49605.2023.10052491",
language = "English",
isbn = "978-1-6654-9309-3",
series = "IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "IEEE",
pages = "767--770",
booktitle = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)",
address = "United States",
}