Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, Hans Wallinga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	7th Int. Conf. SOlid-State Sensors and Actuators (Transducers '93)
Place of Publication	Yokohama, Japan
Pages	787-790
Publication status	Published - 7 Jun 1993

Keywords

@inproceedings{f24ed584420f485bbac0f22e4308ae30,

title = "Towards a micromachined silicon integrated resonator",

keywords = "METIS-114141",

author = "{van Mullem}, C.J. and {van Dam}, F.W.A. and J.H.J. Fluitman and Hans Wallinga",

year = "1993",

month = jun,

day = "7",

language = "Undefined",

pages = "787--790",

booktitle = "7th Int. Conf. SOlid-State Sensors and Actuators (Transducers '93)",

}