Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, Hans Wallinga

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationYokohama, Japan
    Publication statusPublished - 7 Jun 1993

    Keywords

    • METIS-118203

    Cite this

    van Mullem, C. J., van Dam, F. W. A., Fluitman, J. H. J., & Wallinga, H. (1993, Jun 7). Towards a micromachined silicon integrated resonator. Yokohama, Japan.