Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, Hans Wallinga

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationYokohama, Japan
    Publication statusPublished - 7 Jun 1993

    Keywords

    • METIS-118203

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