| Original language | Undefined |
|---|---|
| Place of Publication | Yokohama, Japan |
| Publication status | Published - 7 Jun 1993 |
Keywords
- METIS-118203
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Towards a micromachined silicon integrated resonator
- C.J. van Mullem
- , F.W.A. van Dam
- , J.H.J. Fluitman
- , Hans Wallinga
Research output: Other contribution › Other research output