Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, W. Wallinga

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 17 Jun 1993

    Keywords

    • METIS-117977

    Cite this