Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, W. Wallinga

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 17 Jun 1993

    Keywords

    • METIS-117977

    Cite this

    van Mullem, C. J., van Dam, F. W. A., Fluitman, J. H. J., & Wallinga, W. (1993, Jun 17). Towards a micromachined silicon integrated resonator. Dish Hotel, Enschede.
    van Mullem, C.J. ; van Dam, F.W.A. ; Fluitman, J.H.J. ; Wallinga, W. / Towards a micromachined silicon integrated resonator. 1993. Dish Hotel, Enschede.
    @misc{68fa73ee33e943239d6d17d83021e53e,
    title = "Towards a micromachined silicon integrated resonator",
    keywords = "METIS-117977",
    author = "{van Mullem}, C.J. and {van Dam}, F.W.A. and J.H.J. Fluitman and W. Wallinga",
    year = "1993",
    month = "6",
    day = "17",
    language = "Undefined",
    type = "Other",

    }

    van Mullem, CJ, van Dam, FWA, Fluitman, JHJ & Wallinga, W 1993, Towards a micromachined silicon integrated resonator. Dish Hotel, Enschede.

    Towards a micromachined silicon integrated resonator. / van Mullem, C.J.; van Dam, F.W.A.; Fluitman, J.H.J.; Wallinga, W.

    Dish Hotel, Enschede. 1993, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Towards a micromachined silicon integrated resonator

    AU - van Mullem, C.J.

    AU - van Dam, F.W.A.

    AU - Fluitman, J.H.J.

    AU - Wallinga, W.

    PY - 1993/6/17

    Y1 - 1993/6/17

    KW - METIS-117977

    M3 - Other contribution

    CY - Dish Hotel, Enschede

    ER -

    van Mullem CJ, van Dam FWA, Fluitman JHJ, Wallinga W. Towards a micromachined silicon integrated resonator. 1993.