Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, W. Wallinga

Research output: Other contributionOther research output

Original languageUndefined
Place of PublicationDish Hotel, Enschede
Publication statusPublished - 17 Jun 1993

Keywords

  • METIS-117977

Cite this

van Mullem, C. J., van Dam, F. W. A., Fluitman, J. H. J., & Wallinga, W. (1993, Jun 17). Towards a micromachined silicon integrated resonator. Dish Hotel, Enschede.
van Mullem, C.J. ; van Dam, F.W.A. ; Fluitman, J.H.J. ; Wallinga, W. / Towards a micromachined silicon integrated resonator. 1993. Dish Hotel, Enschede.
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title = "Towards a micromachined silicon integrated resonator",
keywords = "METIS-117977",
author = "{van Mullem}, C.J. and {van Dam}, F.W.A. and J.H.J. Fluitman and W. Wallinga",
year = "1993",
month = "6",
day = "17",
language = "Undefined",
type = "Other",

}

van Mullem, CJ, van Dam, FWA, Fluitman, JHJ & Wallinga, W 1993, Towards a micromachined silicon integrated resonator. Dish Hotel, Enschede.

Towards a micromachined silicon integrated resonator. / van Mullem, C.J.; van Dam, F.W.A.; Fluitman, J.H.J.; Wallinga, W.

Dish Hotel, Enschede. 1993, .

Research output: Other contributionOther research output

TY - GEN

T1 - Towards a micromachined silicon integrated resonator

AU - van Mullem, C.J.

AU - van Dam, F.W.A.

AU - Fluitman, J.H.J.

AU - Wallinga, W.

PY - 1993/6/17

Y1 - 1993/6/17

KW - METIS-117977

M3 - Other contribution

CY - Dish Hotel, Enschede

ER -

van Mullem CJ, van Dam FWA, Fluitman JHJ, Wallinga W. Towards a micromachined silicon integrated resonator. 1993.