Towards a micromachined silicon integrated resonator

C.J. van Mullem, F.W.A. van Dam, J.H.J. Fluitman, W. Wallinga

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 17 Jun 1993

    Keywords

    • METIS-117977

    Cite this

    van Mullem, C. J., van Dam, F. W. A., Fluitman, J. H. J., & Wallinga, W. (1993, Jun 17). Towards a micromachined silicon integrated resonator. Dish Hotel, Enschede.