Towards a microvalve for proportional control of mass flow

Maarten Groen; Dannis Michel Brouwer; Joost Conrad Lötters; Remco J. Wiegerink

Towards a microvalve for proportional control of mass flow

Maarten Groen, Dannis Michel Brouwer, Joost Conrad Lötters, Remco J. Wiegerink

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

3 Downloads (Pure)

Abstract

Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

Original language	Undefined
Title of host publication	1st International Conference on Microfluidic Handling Systems, MFHS 2012
Place of Publication	Enschede
Publisher	University of Twente
Pages	148-151
Number of pages	4
ISBN (Print)	not assigned
Publication status	Published - 10 Oct 2012
Event	1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands Duration: 10 Oct 2012 → 12 Oct 2012 Conference number: 1 https://www.utwente.nl/en/eemcs/mfhs2012/

Publication series

Name	Micromachines
Publisher	University of Twente
ISSN (Print)	2072-666X

Conference

Conference	1st International Conference on MicroFluidic Handling Systems, MFHS 2012
Abbreviated title	MFHS
Country/Territory	Netherlands
City	Enschede
Period	10/10/12 → 12/10/12
Internet address	https://www.utwente.nl/en/eemcs/mfhs2012/

Keywords

TST-FLUID HANDLING
EWI-23010
MEMS
low leakage
IR-84151
mass flow controller
Microvalve
Flow control
METIS-296272
micro actuator

Access to Document

http://eprints.eemcs.utwente.nl/secure2/23010/01/MFHS2012_MSGroen_extended.pdf

Cite this

@inproceedings{d35fdcc1dc5a49a19cd038f51a96c3d0,

title = "Towards a microvalve for proportional control of mass flow",

abstract = "Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.",

keywords = "TST-FLUID HANDLING, EWI-23010, MEMS, low leakage, IR-84151, mass flow controller, Microvalve, Flow control, METIS-296272, micro actuator",

author = "Maarten Groen and Brouwer, {Dannis Michel} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",

note = "http://www.utwente.nl/ewi/mfhs2012/; 1st International Conference on MicroFluidic Handling Systems, MFHS 2012 ; Conference date: 10-10-2012 Through 12-10-2012",

year = "2012",

month = oct,

day = "10",

language = "Undefined",

isbn = "not assigned",

series = "Micromachines",

publisher = "University of Twente",

pages = "148--151",

booktitle = "1st International Conference on Microfluidic Handling Systems, MFHS 2012",

address = "Netherlands",

url = "https://www.utwente.nl/en/eemcs/mfhs2012/",

}

Groen, M, Brouwer, DM , Lötters, JC & Wiegerink, RJ 2012, Towards a microvalve for proportional control of mass flow. in 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Micromachines, University of Twente, Enschede, pp. 148-151, 1st International Conference on MicroFluidic Handling Systems, MFHS 2012, Enschede, Netherlands, 10/10/12. <http://eprints.eemcs.utwente.nl/secure2/23010/01/MFHS2012_MSGroen_extended.pdf>

Towards a microvalve for proportional control of mass flow. / Groen, Maarten; Brouwer, Dannis Michel ; Lötters, Joost Conrad et al.
1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede: University of Twente, 2012. p. 148-151 (Micromachines).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Towards a microvalve for proportional control of mass flow

AU - Groen, Maarten

AU - Brouwer, Dannis Michel

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

N1 - Conference code: 1

PY - 2012/10/10

Y1 - 2012/10/10

N2 - Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

AB - Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

KW - TST-FLUID HANDLING

KW - EWI-23010

KW - MEMS

KW - low leakage

KW - IR-84151

KW - mass flow controller

KW - Microvalve

KW - Flow control

KW - METIS-296272

KW - micro actuator

M3 - Conference contribution

SN - not assigned

T3 - Micromachines

SP - 148

EP - 151

BT - 1st International Conference on Microfluidic Handling Systems, MFHS 2012

PB - University of Twente

CY - Enschede

T2 - 1st International Conference on MicroFluidic Handling Systems, MFHS 2012

Y2 - 10 October 2012 through 12 October 2012

ER -