Towards a microvalve for proportional control of mass flow

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
Original languageUndefined
Title of host publication1st International Conference on Microfluidic Handling Systems, MFHS 2012
Place of PublicationEnschede
PublisherUniversity of Twente
Pages148-151
Number of pages4
ISBN (Print)not assigned
Publication statusPublished - 10 Oct 2012
Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
Duration: 10 Oct 201212 Oct 2012
Conference number: 1
https://www.utwente.nl/en/eemcs/mfhs2012/

Publication series

NameMicromachines
PublisherUniversity of Twente
ISSN (Print)2072-666X

Conference

Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
Abbreviated titleMFHS
CountryNetherlands
CityEnschede
Period10/10/1212/10/12
Internet address

Keywords

  • TST-FLUID HANDLING
  • EWI-23010
  • MEMS
  • low leakage
  • IR-84151
  • mass flow controller
  • Microvalve
  • Flow control
  • METIS-296272
  • micro actuator

Cite this

Groen, M., Brouwer, D. M., Lötters, J. C., & Wiegerink, R. J. (2012). Towards a microvalve for proportional control of mass flow. In 1st International Conference on Microfluidic Handling Systems, MFHS 2012 (pp. 148-151). (Micromachines). Enschede: University of Twente.