Towards a microvalve for proportional control of mass flow

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
Original languageUndefined
Title of host publication1st International Conference on Microfluidic Handling Systems, MFHS 2012
Place of PublicationEnschede
PublisherUniversity of Twente
Pages148-151
Number of pages4
ISBN (Print)not assigned
Publication statusPublished - 10 Oct 2012
Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
Duration: 10 Oct 201212 Oct 2012
Conference number: 1
https://www.utwente.nl/en/eemcs/mfhs2012/

Publication series

NameMicromachines
PublisherUniversity of Twente
ISSN (Print)2072-666X

Conference

Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
Abbreviated titleMFHS
CountryNetherlands
CityEnschede
Period10/10/1212/10/12
Internet address

Keywords

  • TST-FLUID HANDLING
  • EWI-23010
  • MEMS
  • low leakage
  • IR-84151
  • mass flow controller
  • Microvalve
  • Flow control
  • METIS-296272
  • micro actuator

Cite this

Groen, M., Brouwer, D. M., Lötters, J. C., & Wiegerink, R. J. (2012). Towards a microvalve for proportional control of mass flow. In 1st International Conference on Microfluidic Handling Systems, MFHS 2012 (pp. 148-151). (Micromachines). Enschede: University of Twente.
Groen, Maarten ; Brouwer, Dannis Michel ; Lötters, Joost Conrad ; Wiegerink, Remco J. / Towards a microvalve for proportional control of mass flow. 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede : University of Twente, 2012. pp. 148-151 (Micromachines).
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title = "Towards a microvalve for proportional control of mass flow",
abstract = "Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.",
keywords = "TST-FLUID HANDLING, EWI-23010, MEMS, low leakage, IR-84151, mass flow controller, Microvalve, Flow control, METIS-296272, micro actuator",
author = "Maarten Groen and Brouwer, {Dannis Michel} and L{\"o}tters, {Joost Conrad} and Wiegerink, {Remco J.}",
note = "http://www.utwente.nl/ewi/mfhs2012/",
year = "2012",
month = "10",
day = "10",
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isbn = "not assigned",
series = "Micromachines",
publisher = "University of Twente",
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booktitle = "1st International Conference on Microfluidic Handling Systems, MFHS 2012",
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}

Groen, M, Brouwer, DM, Lötters, JC & Wiegerink, RJ 2012, Towards a microvalve for proportional control of mass flow. in 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Micromachines, University of Twente, Enschede, pp. 148-151, 1st International Conference on MicroFluidic Handling Systems, MFHS 2012, Enschede, Netherlands, 10/10/12.

Towards a microvalve for proportional control of mass flow. / Groen, Maarten; Brouwer, Dannis Michel; Lötters, Joost Conrad; Wiegerink, Remco J.

1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede : University of Twente, 2012. p. 148-151 (Micromachines).

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

TY - GEN

T1 - Towards a microvalve for proportional control of mass flow

AU - Groen, Maarten

AU - Brouwer, Dannis Michel

AU - Lötters, Joost Conrad

AU - Wiegerink, Remco J.

N1 - http://www.utwente.nl/ewi/mfhs2012/

PY - 2012/10/10

Y1 - 2012/10/10

N2 - Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

AB - Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. We have therefore identified and evaluated the most basic valve operating principles with respect to functionality and technology, and have reviewed several basic actuation schemes. Proceeding from these analyses, we have identified the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

KW - TST-FLUID HANDLING

KW - EWI-23010

KW - MEMS

KW - low leakage

KW - IR-84151

KW - mass flow controller

KW - Microvalve

KW - Flow control

KW - METIS-296272

KW - micro actuator

M3 - Conference contribution

SN - not assigned

T3 - Micromachines

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EP - 151

BT - 1st International Conference on Microfluidic Handling Systems, MFHS 2012

PB - University of Twente

CY - Enschede

ER -

Groen M, Brouwer DM, Lötters JC, Wiegerink RJ. Towards a microvalve for proportional control of mass flow. In 1st International Conference on Microfluidic Handling Systems, MFHS 2012. Enschede: University of Twente. 2012. p. 148-151. (Micromachines).