Towards embedded control for resonant scanning MEMS micromirror

A.A. Kuijpers; D. Lierop; R.H.M. Sanders; J. Tangenberg; H. Moddejonge; J.W.Th. Eikenbroek; Theodorus S.J. Lammerink; Remco J. Wiegerink

doi:10.1016/j.proche.2009.07.326

Towards embedded control for resonant scanning MEMS micromirror

A.A. Kuijpers, D. Lierop, R.H.M. Sanders, J. Tangenberg, H. Moddejonge, J.W.Th. Eikenbroek, Theodorus S.J. Lammerink, Remco J. Wiegerink

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Abstract

This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

Original language	Undefined
Article number	10.1016/j.proche.2009.07.326
Pages (from-to)	1307-1310
Number of pages	4
Journal	Procedia chemistry
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.326
Publication status	Published - Sept 2009

Keywords

EWI-16922
TST-SENSORS
IR-68936
METIS-264194

Access to Document

10.1016/j.proche.2009.07.326

EurosensorsXIII_Toon_final

http://eprints.eemcs.utwente.nl/secure2/16922/01/EurosensorsXIII_Toon_final.pdf

Cite this

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title = "Towards embedded control for resonant scanning MEMS micromirror",

abstract = "This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL",

keywords = "EWI-16922, TST-SENSORS, IR-68936, METIS-264194",

author = "A.A. Kuijpers and D. Lierop and R.H.M. Sanders and J. Tangenberg and H. Moddejonge and J.W.Th. Eikenbroek and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.}",

note = "Open access. Proceedings of the Eurosensors XXIII conference ",

year = "2009",

month = sep,

doi = "10.1016/j.proche.2009.07.326",

language = "Undefined",

volume = "1",

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T1 - Towards embedded control for resonant scanning MEMS micromirror

AU - Kuijpers, A.A.

AU - Lierop, D.

AU - Sanders, R.H.M.

AU - Tangenberg, J.

AU - Moddejonge, H.

AU - Eikenbroek, J.W.Th.

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

N1 - Open access. Proceedings of the Eurosensors XXIII conference

PY - 2009/9

Y1 - 2009/9

N2 - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

AB - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

KW - EWI-16922

KW - TST-SENSORS

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KW - METIS-264194

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