Towards embedded control for resonant scanning MEMS micromirror

A.A. Kuijpers, D. Lierop, R.H.M. Sanders, J. Tangenberg, H. Moddejonge, J.W.Th. Eikenbroek, Theodorus S.J. Lammerink, Remco J. Wiegerink

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    Abstract

    This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL
    Original languageUndefined
    Article number10.1016/j.proche.2009.07.326
    Pages (from-to)1307-1310
    Number of pages4
    JournalProcedia chemistry
    Volume1
    Issue number1
    DOIs
    Publication statusPublished - Sep 2009

    Keywords

    • EWI-16922
    • TST-SENSORS
    • IR-68936
    • METIS-264194

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