Towards embedded control for resonant scanning MEMS micromirror

A.A. Kuijpers, D. Lierop, R.H.M. Sanders, J. Tangenberg, H. Moddejonge, J.W.Th. Eikenbroek, Theodorus S.J. Lammerink, Remco J. Wiegerink

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Abstract

This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL
Original languageUndefined
Article number10.1016/j.proche.2009.07.326
Pages (from-to)1307-1310
Number of pages4
JournalProcedia chemistry
Volume1
Issue number1
DOIs
Publication statusPublished - Sep 2009

Keywords

  • EWI-16922
  • TST-SENSORS
  • IR-68936
  • METIS-264194

Cite this

Kuijpers, A. A., Lierop, D., Sanders, R. H. M., Tangenberg, J., Moddejonge, H., Eikenbroek, J. W. T., ... Wiegerink, R. J. (2009). Towards embedded control for resonant scanning MEMS micromirror. Procedia chemistry, 1(1), 1307-1310. [10.1016/j.proche.2009.07.326]. https://doi.org/10.1016/j.proche.2009.07.326
Kuijpers, A.A. ; Lierop, D. ; Sanders, R.H.M. ; Tangenberg, J. ; Moddejonge, H. ; Eikenbroek, J.W.Th. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. / Towards embedded control for resonant scanning MEMS micromirror. In: Procedia chemistry. 2009 ; Vol. 1, No. 1. pp. 1307-1310.
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abstract = "This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL",
keywords = "EWI-16922, TST-SENSORS, IR-68936, METIS-264194",
author = "A.A. Kuijpers and D. Lierop and R.H.M. Sanders and J. Tangenberg and H. Moddejonge and J.W.Th. Eikenbroek and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.}",
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month = "9",
doi = "10.1016/j.proche.2009.07.326",
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Kuijpers, AA, Lierop, D, Sanders, RHM, Tangenberg, J, Moddejonge, H, Eikenbroek, JWT, Lammerink, TSJ & Wiegerink, RJ 2009, 'Towards embedded control for resonant scanning MEMS micromirror' Procedia chemistry, vol. 1, no. 1, 10.1016/j.proche.2009.07.326, pp. 1307-1310. https://doi.org/10.1016/j.proche.2009.07.326

Towards embedded control for resonant scanning MEMS micromirror. / Kuijpers, A.A.; Lierop, D.; Sanders, R.H.M.; Tangenberg, J.; Moddejonge, H.; Eikenbroek, J.W.Th.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.

In: Procedia chemistry, Vol. 1, No. 1, 10.1016/j.proche.2009.07.326, 09.2009, p. 1307-1310.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - Towards embedded control for resonant scanning MEMS micromirror

AU - Kuijpers, A.A.

AU - Lierop, D.

AU - Sanders, R.H.M.

AU - Tangenberg, J.

AU - Moddejonge, H.

AU - Eikenbroek, J.W.Th.

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

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N2 - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

AB - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

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KW - TST-SENSORS

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Kuijpers AA, Lierop D, Sanders RHM, Tangenberg J, Moddejonge H, Eikenbroek JWT et al. Towards embedded control for resonant scanning MEMS micromirror. Procedia chemistry. 2009 Sep;1(1):1307-1310. 10.1016/j.proche.2009.07.326. https://doi.org/10.1016/j.proche.2009.07.326