Abstract
| Original language | Undefined |
|---|---|
| Article number | 10.1016/j.proche.2009.07.326 |
| Pages (from-to) | 1307-1310 |
| Number of pages | 4 |
| Journal | Procedia chemistry |
| Volume | 1 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Sep 2009 |
Keywords
- EWI-16922
- TST-SENSORS
- IR-68936
- METIS-264194
Cite this
}
Towards embedded control for resonant scanning MEMS micromirror. / Kuijpers, A.A.; Lierop, D.; Sanders, R.H.M.; Tangenberg, J.; Moddejonge, H.; Eikenbroek, J.W.Th.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.
In: Procedia chemistry, Vol. 1, No. 1, 10.1016/j.proche.2009.07.326, 09.2009, p. 1307-1310.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Towards embedded control for resonant scanning MEMS micromirror
AU - Kuijpers, A.A.
AU - Lierop, D.
AU - Sanders, R.H.M.
AU - Tangenberg, J.
AU - Moddejonge, H.
AU - Eikenbroek, J.W.Th.
AU - Lammerink, Theodorus S.J.
AU - Wiegerink, Remco J.
N1 - Open access. Proceedings of the Eurosensors XXIII conference
PY - 2009/9
Y1 - 2009/9
N2 - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL
AB - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL
KW - EWI-16922
KW - TST-SENSORS
KW - IR-68936
KW - METIS-264194
U2 - 10.1016/j.proche.2009.07.326
DO - 10.1016/j.proche.2009.07.326
M3 - Article
VL - 1
SP - 1307
EP - 1310
JO - Procedia chemistry
JF - Procedia chemistry
SN - 1876-6196
IS - 1
M1 - 10.1016/j.proche.2009.07.326
ER -