Towards embedded control for resonant scanning MEMS micromirror

A.A. Kuijpers, D. Lierop, R.H.M. Sanders, J. Tangenberg, H. Moddejonge, J.W.Th. Eikenbroek, Theodorus S.J. Lammerink, Remco J. Wiegerink

    Research output: Contribution to journalArticleAcademicpeer-review

    10 Citations (Scopus)
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    Abstract

    This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL
    Original languageUndefined
    Article number10.1016/j.proche.2009.07.326
    Pages (from-to)1307-1310
    Number of pages4
    JournalProcedia chemistry
    Volume1
    Issue number1
    DOIs
    Publication statusPublished - Sep 2009

    Keywords

    • EWI-16922
    • TST-SENSORS
    • IR-68936
    • METIS-264194

    Cite this

    Kuijpers, A. A., Lierop, D., Sanders, R. H. M., Tangenberg, J., Moddejonge, H., Eikenbroek, J. W. T., ... Wiegerink, R. J. (2009). Towards embedded control for resonant scanning MEMS micromirror. Procedia chemistry, 1(1), 1307-1310. [10.1016/j.proche.2009.07.326]. https://doi.org/10.1016/j.proche.2009.07.326
    Kuijpers, A.A. ; Lierop, D. ; Sanders, R.H.M. ; Tangenberg, J. ; Moddejonge, H. ; Eikenbroek, J.W.Th. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. / Towards embedded control for resonant scanning MEMS micromirror. In: Procedia chemistry. 2009 ; Vol. 1, No. 1. pp. 1307-1310.
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    title = "Towards embedded control for resonant scanning MEMS micromirror",
    abstract = "This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL",
    keywords = "EWI-16922, TST-SENSORS, IR-68936, METIS-264194",
    author = "A.A. Kuijpers and D. Lierop and R.H.M. Sanders and J. Tangenberg and H. Moddejonge and J.W.Th. Eikenbroek and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.}",
    note = "Open access. Proceedings of the Eurosensors XXIII conference",
    year = "2009",
    month = "9",
    doi = "10.1016/j.proche.2009.07.326",
    language = "Undefined",
    volume = "1",
    pages = "1307--1310",
    journal = "Procedia chemistry",
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    Kuijpers, AA, Lierop, D, Sanders, RHM, Tangenberg, J, Moddejonge, H, Eikenbroek, JWT, Lammerink, TSJ & Wiegerink, RJ 2009, 'Towards embedded control for resonant scanning MEMS micromirror', Procedia chemistry, vol. 1, no. 1, 10.1016/j.proche.2009.07.326, pp. 1307-1310. https://doi.org/10.1016/j.proche.2009.07.326

    Towards embedded control for resonant scanning MEMS micromirror. / Kuijpers, A.A.; Lierop, D.; Sanders, R.H.M.; Tangenberg, J.; Moddejonge, H.; Eikenbroek, J.W.Th.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.

    In: Procedia chemistry, Vol. 1, No. 1, 10.1016/j.proche.2009.07.326, 09.2009, p. 1307-1310.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Towards embedded control for resonant scanning MEMS micromirror

    AU - Kuijpers, A.A.

    AU - Lierop, D.

    AU - Sanders, R.H.M.

    AU - Tangenberg, J.

    AU - Moddejonge, H.

    AU - Eikenbroek, J.W.Th.

    AU - Lammerink, Theodorus S.J.

    AU - Wiegerink, Remco J.

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    AB - This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL

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    Kuijpers AA, Lierop D, Sanders RHM, Tangenberg J, Moddejonge H, Eikenbroek JWT et al. Towards embedded control for resonant scanning MEMS micromirror. Procedia chemistry. 2009 Sep;1(1):1307-1310. 10.1016/j.proche.2009.07.326. https://doi.org/10.1016/j.proche.2009.07.326