Towards embedded control for resonant scanning MEMS micromirror

A.A. Kuijpers, D. Lierop, R.H.M. Sanders, J. Tangenberg, H. Moddejonge, J.W.Th. Eikenbroek, Theodorus S.J. Lammerink, Remco J. Wiegerink

    Research output: Contribution to journalArticleAcademicpeer-review

    15 Citations (Scopus)
    576 Downloads (Pure)


    This paper describes the design and realization of an electrostatic actuated MEMS mirror operating at a resonance frequency of 23.5 KHz with a PLL feedback loop. The design is based upon a thorough understanding of the (non-linear) dynamical behavior of the mirror. Using an external position sensitive device (PSD) the proper working of the PLL is demonstrated. Next we study the possibility to replace the PSD sensor with an embedded capacitive phase-angle sensor. We show measurements of capacitance changes with large parasitic influences while actuating the mirror in a feed forward mode. This demonstrates the feasibility of a fully embedded control for a resonant scanning MEMS mirror. Keywords: MEMS micromirror; laser display; raster scanning, capacitive tilt-angle sensor; PLL
    Original languageUndefined
    Article number10.1016/j.proche.2009.07.326
    Pages (from-to)1307-1310
    Number of pages4
    JournalProcedia chemistry
    Issue number1
    Publication statusPublished - Sept 2009


    • EWI-16922
    • IR-68936
    • METIS-264194

    Cite this