Towards First Ever Active Wafer Support Based on Piezoelectric Thin Films

Research output: Contribution to conference › Poster › Professional

Original language	English
Publication status	Published - 19 Jun 2025
Event	ASML Technology Conference 2025 - Den Bosch, Netherlands Duration: 19 Jun 2025 → 19 Jun 2025

Cite this

@conference{6157c2edb93e48878620d4d6234e66ac,

title = "Towards First Ever Active Wafer Support Based on Piezoelectric Thin Films",

author = "Ertuğ {\c S}im{\c s}ek and Bas Jansen and Marcelo Ackermann and Muharrem Bayraktar",

year = "2025",

month = jun,

day = "19",

language = "English",

note = "ASML Technology Conference 2025 ; Conference date: 19-06-2025 Through 19-06-2025",

}