Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

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    Abstract

    Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.
    Original languageUndefined
    Title of host publication24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)
    PublisherIEEE
    Pages648-651
    Number of pages4
    ISBN (Print)978-1-4244-9633-4
    DOIs
    Publication statusPublished - Jan 2011
    Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Abbreviated titleMEMS
    CountryMexico
    CityCancun
    Period23/01/1127/01/11

    Keywords

    • METIS-277492
    • EWI-19326
    • TST-Life like
    • IR-75673

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