Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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48 Downloads (Pure)

Abstract

Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.
Original languageUndefined
Title of host publication24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)
PublisherIEEE
Pages648-651
Number of pages4
ISBN (Print)978-1-4244-9633-4
DOIs
Publication statusPublished - Jan 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 23 Jan 201127 Jan 2011
Conference number: 24

Publication series

Name
PublisherIEEE

Conference

Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated titleMEMS
CountryMexico
CityCancun
Period23/01/1127/01/11

Keywords

  • METIS-277492
  • EWI-19326
  • TST-Life like
  • IR-75673

Cite this

@inproceedings{05347ae2ea3c490aa9483e2e0460a957,
title = "Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition",
abstract = "Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.",
keywords = "METIS-277492, EWI-19326, TST-Life like, IR-75673",
author = "A.M.K. Dagamseh and Lammerink, {Theodorus S.J.} and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",
note = "10.1109/MEMSYS.2011.5734508",
year = "2011",
month = "1",
doi = "10.1109/MEMSYS.2011.5734508",
language = "Undefined",
isbn = "978-1-4244-9633-4",
publisher = "IEEE",
pages = "648--651",
booktitle = "24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)",
address = "United States",

}

Dagamseh, AMK, Lammerink, TSJ, Sanders, RGP, Wiegerink, RJ & Krijnen, GJM 2011, Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. in 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, pp. 648-651, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734508

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. / Dagamseh, A.M.K.; Lammerink, Theodorus S.J.; Sanders, Remco G.P.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.

24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, 2011. p. 648-651.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

AU - Dagamseh, A.M.K.

AU - Lammerink, Theodorus S.J.

AU - Sanders, Remco G.P.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

N1 - 10.1109/MEMSYS.2011.5734508

PY - 2011/1

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N2 - Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

AB - Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

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