Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    8 Citations (Scopus)
    60 Downloads (Pure)

    Abstract

    Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.
    Original languageUndefined
    Title of host publication24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)
    PublisherIEEE
    Pages648-651
    Number of pages4
    ISBN (Print)978-1-4244-9633-4
    DOIs
    Publication statusPublished - Jan 2011
    Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Abbreviated titleMEMS
    CountryMexico
    CityCancun
    Period23/01/1127/01/11

    Keywords

    • METIS-277492
    • EWI-19326
    • TST-Life like
    • IR-75673

    Cite this

    @inproceedings{05347ae2ea3c490aa9483e2e0460a957,
    title = "Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition",
    abstract = "Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.",
    keywords = "METIS-277492, EWI-19326, TST-Life like, IR-75673",
    author = "A.M.K. Dagamseh and Lammerink, {Theodorus S.J.} and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",
    note = "10.1109/MEMSYS.2011.5734508",
    year = "2011",
    month = "1",
    doi = "10.1109/MEMSYS.2011.5734508",
    language = "Undefined",
    isbn = "978-1-4244-9633-4",
    publisher = "IEEE",
    pages = "648--651",
    booktitle = "24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)",
    address = "United States",

    }

    Dagamseh, AMK, Lammerink, TSJ, Sanders, RGP, Wiegerink, RJ & Krijnen, GJM 2011, Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. in 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, pp. 648-651, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734508

    Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. / Dagamseh, A.M.K.; Lammerink, Theodorus S.J.; Sanders, Remco G.P.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.

    24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, 2011. p. 648-651.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

    AU - Dagamseh, A.M.K.

    AU - Lammerink, Theodorus S.J.

    AU - Sanders, Remco G.P.

    AU - Wiegerink, Remco J.

    AU - Krijnen, Gijsbertus J.M.

    N1 - 10.1109/MEMSYS.2011.5734508

    PY - 2011/1

    Y1 - 2011/1

    N2 - Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

    AB - Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

    KW - METIS-277492

    KW - EWI-19326

    KW - TST-Life like

    KW - IR-75673

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    DO - 10.1109/MEMSYS.2011.5734508

    M3 - Conference contribution

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    BT - 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)

    PB - IEEE

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