Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

A.M.K. Dagamseh; Theodorus S.J. Lammerink; Remco G.P. Sanders; Remco J. Wiegerink; Gijsbertus J.M. Krijnen

doi:10.1109/MEMSYS.2011.5734508

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition

A.M.K. Dagamseh
, Theodorus S.J. Lammerink
, Remco G.P. Sanders
, Remco J. Wiegerink
, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

16 Citations (Scopus)

303 Downloads (Pure)

Abstract

Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

Original language	Undefined
Title of host publication	24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)
Publisher	IEEE
Pages	648-651
Number of pages	4
ISBN (Print)	978-1-4244-9633-4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734508
Publication status	Published - Jan 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24

Publication series

Name
Publisher	IEEE

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated title	MEMS
Country/Territory	Mexico
City	Cancun
Period	23/01/11 → 27/01/11

Keywords

METIS-277492
EWI-19326
TST-Life like
IR-75673

Access to Document

10.1109/MEMSYS.2011.5734508

Cite this

@inproceedings{05347ae2ea3c490aa9483e2e0460a957,

title = "Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition",

abstract = "Next to image sensors, future{\textquoteright}s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.",

keywords = "METIS-277492, EWI-19326, TST-Life like, IR-75673",

author = "A.M.K. Dagamseh and Lammerink, \{Theodorus S.J.\} and Sanders, \{Remco G.P.\} and Wiegerink, \{Remco J.\} and Krijnen, \{Gijsbertus J.M.\}",

note = "10.1109/MEMSYS.2011.5734508 ; 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

year = "2011",

month = jan,

doi = "10.1109/MEMSYS.2011.5734508",

language = "Undefined",

isbn = "978-1-4244-9633-4",

publisher = "IEEE",

pages = "648--651",

booktitle = "24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011)",

address = "United States",

}

Dagamseh, AMK, Lammerink, TSJ, Sanders, RGP , Wiegerink, RJ & Krijnen, GJM 2011, Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. in 24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, pp. 648-651, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734508

Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. / Dagamseh, A.M.K.; Lammerink, Theodorus S.J.; Sanders, Remco G.P. et al.
24th IEEE International conference on Micro Electro Mechanical Systems (MEMS 2011). IEEE, 2011. p. 648-651.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Dagamseh, A.M.K.

AU - Lammerink, Theodorus S.J.

AU - Sanders, Remco G.P.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

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AB - Next to image sensors, future’s robots will definitely use a variety of sensing mechanisms for navigation and prevention of risks to human life, for example flow-sensor arrays for 3D hydrodynamic reconstruction of the near environment. This paper aims to quantify the possibilities of our artificial hair flow-sensor for high-resolution flow field visualization. Using silicon-on-insulator (SOI) technology with deep trench isolation structures, hair-based flow sensors with separate electrodes arranged in wafer-scale arrays have been successfully fabricated. Frequency Division Multiplexing (FDM) is used to interrogate individual hair elements providing simultaneous real-time flow measurements from multiple hairs. This is demonstrated by reconstructing the dipole fields along different array elements and hence localizing a dipole source relative to the hair array elements.

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