Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes

Ö. Sardan Sukas; Johan W. Berenschot; Meint J. de Boer; Duc Minh Nguyen; M. van Zalk; Leon Abelmann

Towards in-situ tem analysis of PLD Pb(Zr,Ti)O₃ thin film membranes

Ö. Sardan Sukas, Johan W. Berenschot, Meint J. de Boer, Duc Minh Nguyen, M. van Zalk, Leon Abelmann

Inorganic Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is unique in the sense that it will facilitate in-situ characterization of the PLD PZT membranes during actuation. As well as PLD PZT, the proposed method can be applied to a variety of materials by proper selection of the etchants and tuning of the process parameters. Being a critical step of the process sequence, the deposition profile of the PZT layer on the Lanthanum Nickel Oxide (LNO) seed layer is characterized prior to fabrication. The results reveal that the PLD process is not conformal and the thickness of the LNO/PZT layer is different on surfaces with different topographies.

Original language	Undefined
Title of host publication	Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Place of Publication	Norway
Publisher	Vestfold University College
Pages	287-290
Number of pages	4
ISBN (Print)	978-82-7860-224-9
Publication status	Published - 2011
Event	22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011 Conference number: 22

Publication series

Name
Publisher	Vestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference	22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated title	MME
Country/Territory	Norway
City	Tønsberg
Period	19/06/11 → 22/06/11

Keywords

TST-uSPAM: micro Scanning Probe Array Memory
TST-SMI: Formerly in EWI-SMI
EWI-21311
Pulsed Laser Deposition (PLD)
Transmission Electron Microscopy (TEM) Membrane
Lead Zirconium Titanate (PZT)
In-situ Analysis
IR-79401
METIS-287847

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Cite this

@inproceedings{bea1c11e70b44f6f81626fdb7569468e,

title = "Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes",

abstract = "In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is unique in the sense that it will facilitate in-situ characterization of the PLD PZT membranes during actuation. As well as PLD PZT, the proposed method can be applied to a variety of materials by proper selection of the etchants and tuning of the process parameters. Being a critical step of the process sequence, the deposition profile of the PZT layer on the Lanthanum Nickel Oxide (LNO) seed layer is characterized prior to fabrication. The results reveal that the PLD process is not conformal and the thickness of the LNO/PZT layer is different on surfaces with different topographies.",

keywords = "TST-uSPAM: micro Scanning Probe Array Memory, TST-SMI: Formerly in EWI-SMI, EWI-21311, Pulsed Laser Deposition (PLD), Transmission Electron Microscopy (TEM) Membrane, Lead Zirconium Titanate (PZT), In-situ Analysis, IR-79401, METIS-287847",

author = "{Sardan Sukas}, {\"O}. and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and Nguyen, {Duc Minh} and {van Zalk}, M. and Leon Abelmann",

note = "http://www.mme2011.org/MME2011_Proceedings.pdf; 22nd Micromechanics and Microsystems Europe Workshop, MME 2011 ; Conference date: 19-06-2011 Through 22-06-2011",

year = "2011",

language = "Undefined",

isbn = "978-82-7860-224-9",

publisher = "Vestfold University College",

pages = "287--290",

booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop",

}

Sardan Sukas, Ö, Berenschot, JW, de Boer, MJ, Nguyen, DM, van Zalk, M & Abelmann, L 2011, Towards in-situ tem analysis of PLD Pb(Zr,Ti)O₃ thin film membranes. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Vestfold University College, Norway, pp. 287-290, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tønsberg, Norway, 19/06/11.

Towards in-situ tem analysis of PLD Pb(Zr,Ti)O₃ thin film membranes. / Sardan Sukas, Ö.; Berenschot, Johan W.; de Boer, Meint J. et al.
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. Norway: Vestfold University College, 2011. p. 287-290.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes

AU - Sardan Sukas, Ö.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Nguyen, Duc Minh

AU - van Zalk, M.

AU - Abelmann, Leon

N1 - Conference code: 22

PY - 2011

Y1 - 2011

N2 - In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is unique in the sense that it will facilitate in-situ characterization of the PLD PZT membranes during actuation. As well as PLD PZT, the proposed method can be applied to a variety of materials by proper selection of the etchants and tuning of the process parameters. Being a critical step of the process sequence, the deposition profile of the PZT layer on the Lanthanum Nickel Oxide (LNO) seed layer is characterized prior to fabrication. The results reveal that the PLD process is not conformal and the thickness of the LNO/PZT layer is different on surfaces with different topographies.

AB - In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is unique in the sense that it will facilitate in-situ characterization of the PLD PZT membranes during actuation. As well as PLD PZT, the proposed method can be applied to a variety of materials by proper selection of the etchants and tuning of the process parameters. Being a critical step of the process sequence, the deposition profile of the PZT layer on the Lanthanum Nickel Oxide (LNO) seed layer is characterized prior to fabrication. The results reveal that the PLD process is not conformal and the thickness of the LNO/PZT layer is different on surfaces with different topographies.

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - TST-SMI: Formerly in EWI-SMI

KW - EWI-21311

KW - Pulsed Laser Deposition (PLD)

KW - Transmission Electron Microscopy (TEM) Membrane

KW - Lead Zirconium Titanate (PZT)

KW - In-situ Analysis

KW - IR-79401

KW - METIS-287847

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - 287

EP - 290

BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

PB - Vestfold University College

CY - Norway

T2 - 22nd Micromechanics and Microsystems Europe Workshop, MME 2011

Y2 - 19 June 2011 through 22 June 2011

ER -