Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes

Ö. Sardan Sukas, Johan W. Berenschot, Meint J. de Boer, Duc Minh Nguyen, M. van Zalk, Leon Abelmann

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Abstract

In this paper, a novel technique for fabricating Transmission Electron Microscopy (TEM) chips for investigating structural and piezoelectric properties of Pulse Laser Deposited (PLD) Lead Zirconium Titanate (PZT) thin films is presented. The method involves silicon-on-insulator (SOI) wafer technology together with deep reactive ion etching (DRIE) and highly selective etchants. This study is unique in the sense that it will facilitate in-situ characterization of the PLD PZT membranes during actuation. As well as PLD PZT, the proposed method can be applied to a variety of materials by proper selection of the etchants and tuning of the process parameters. Being a critical step of the process sequence, the deposition profile of the PZT layer on the Lanthanum Nickel Oxide (LNO) seed layer is characterized prior to fabrication. The results reveal that the PLD process is not conformal and the thickness of the LNO/PZT layer is different on surfaces with different topographies.
Original languageUndefined
Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Place of PublicationNorway
PublisherVestfold University College, Department of Micro and Nano Systems Technology
Pages287-290
Number of pages4
ISBN (Print)978-82-7860-224-9
Publication statusPublished - 2011
Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011 - Tønsberg, Norway
Duration: 19 Jun 201122 Jun 2011
Conference number: 22

Publication series

Name
PublisherVestfold University College, Department of Micro and Nano Systems Technology

Conference

Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011
Abbreviated titleMME
CountryNorway
CityTønsberg
Period19/06/1122/06/11

Keywords

  • TST-uSPAM: micro Scanning Probe Array Memory
  • TST-SMI: Formerly in EWI-SMI
  • EWI-21311
  • Pulsed Laser Deposition (PLD)
  • Transmission Electron Microscopy (TEM) Membrane
  • Lead Zirconium Titanate (PZT)
  • In-situ Analysis
  • IR-79401
  • METIS-287847

Cite this

Sardan Sukas, Ö., Berenschot, J. W., de Boer, M. J., Nguyen, D. M., van Zalk, M., & Abelmann, L. (2011). Towards in-situ tem analysis of PLD Pb(Zr,Ti)O3 thin film membranes. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop (pp. 287-290). Norway: Vestfold University College, Department of Micro and Nano Systems Technology.