Abstract
In this paper we propose two novel methods for the fabrication of microfluidic channels with circular cross-section and a relatively large diameter in the range of 300 to 1000 µm. The aim is to use such channels in a micro Coriolis mass flow sensor as an alternative to the well-known Surface Channel Technology (SCT). One method is based on sol-gel technology, where PDMS mold is coated with silicon
oxide to form the channel wall. The other method involves electroplating of a opper or nickel channel wall around a wire of ABS.
oxide to form the channel wall. The other method involves electroplating of a opper or nickel channel wall around a wire of ABS.
| Original language | English |
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| Publication status | Published - 2019 |
| Event | 4th Conference on MicroFluidic Handling Systems, MFHS 2019 - De Kleine Willem, Enschede, Netherlands Duration: 2 Oct 2019 → 4 Oct 2019 Conference number: 4 https://www.mfhs2019.org/ |
Conference
| Conference | 4th Conference on MicroFluidic Handling Systems, MFHS 2019 |
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| Abbreviated title | MFHS 2019 |
| Country/Territory | Netherlands |
| City | Enschede |
| Period | 2/10/19 → 4/10/19 |
| Internet address |
Keywords
- Large diameter circular microchannels, micro Coriolis mass flow sensor, sol gel, electroplating