Towards integrated microliquid handling systems

In this paper we describe components for integrated microliquid handling systems such as fluid injection analysis, and first results of planar integration of components. The components discussed are channels, passive and active valves, actuators for micropumps, micromixers, microflow sensors, optical detectors, pumps and dosage systems. The dosage system described comprises a flow sensor and a pump micromachined on a single silicon wafer sandwiched between Pyrex wafers. The liquid pump is of the reciprocating type with a thermo-pneumatic actuator. The microliquid flow sensor is based on the thermal anemometer type. Both pump and flow sensor are realized in a 3 inch (100)- Si wafer using a KOH bulk etch from both sides of the wafer. The dosing system allows accurate dosing of liquid in the wl regime and can easily be integrated with components as mixers and detectors to microliquid handling systems. A new concept for micromixing of liquids is introduced and its feasibility is demonstrated. The mixer allows fast mixing of small amounts of two liquids and it is applicable to microliquid handling systems. The,mixer has a channel for the liquid, an inlet port for the reagent, and a mixing area, the bottom of which has 400 micronozzles (15 pm xi5 Nm). Through these nozzles, a reagent is injected into the sample liquid, making many microplumes. These plumes speed up mixing by diffusion over a short distance