Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

M.B. Syed Nawazuddin, Theodorus S.J. Lammerink, Remco J. Wiegerink, Johan W. Berenschot, Meint J. de Boer, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however measurement of the Casimir force between parallel plates with sub-micron separation distance is still a demanding task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. This paper presents a MEMS chip which is realized to measure the Casimir force between two gold-coated parallel plates at sub-micron distance. The fabrication process to realize the parallel plate structures, the assembly procedure of the measurement setup and some initial characterization results are presented.
    Original languageUndefined
    Title of host publicationProceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
    Place of PublicationUSA
    PublisherIEEE Electron Devices Society
    Pages434-437
    Number of pages4
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - 1 Aug 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name
    PublisherIEEE Electron Devices Society

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Keywords

    • IR-79655
    • METIS-284915
    • Casimir force
    • EWI-20737
    • Micro machining
    • TST-SENSORS
    • parallel plate geometry

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