Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

M.B. Syed Nawazuddin; Theodorus S.J. Lammerink; Remco J. Wiegerink; Johan W. Berenschot; Meint J. de Boer; Michael Curt Elwenspoek

doi:10.1109/TRANSDUCERS.2011.5969571

Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

M.B. Syed Nawazuddin
, Theodorus S.J. Lammerink
, Remco J. Wiegerink
, Johan W. Berenschot
, Meint J. de Boer
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

35 Downloads (Pure)

Abstract

Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however measurement of the Casimir force between parallel plates with sub-micron separation distance is still a demanding task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. This paper presents a MEMS chip which is realized to measure the Casimir force between two gold-coated parallel plates at sub-micron distance. The fabrication process to realize the parallel plate structures, the assembly procedure of the measurement setup and some initial characterization results are presented.

Original language	Undefined
Title of host publication	Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011
Place of Publication	USA
Publisher	IEEE
Pages	434-437
Number of pages	4
ISBN (Print)	978-1-4577-0157-3
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969571
Publication status	Published - 1 Aug 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/

Publication series

Name
Publisher	IEEE Electron Devices Society

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Abbreviated title	TRANSDUCERS 2011
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11
Internet address	http://transducers11-beijing.org/

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

IR-79655
METIS-284915
Casimir force
EWI-20737
Micro machining
TST-SENSORS
parallel plate geometry

Access to Document

10.1109/TRANSDUCERS.2011.5969571

Cite this

Syed Nawazuddin, M. B., Lammerink, T. S. J., Wiegerink, R. J., Berenschot, J. W., de Boer, M. J., & Elwenspoek, M. C. (2011). Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011 (pp. 434-437). IEEE. https://doi.org/10.1109/TRANSDUCERS.2011.5969571

@inproceedings{63d3c2cd6ace44bfaeb9e85991d68368,

title = "Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance",

abstract = "Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however measurement of the Casimir force between parallel plates with sub-micron separation distance is still a demanding task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. This paper presents a MEMS chip which is realized to measure the Casimir force between two gold-coated parallel plates at sub-micron distance. The fabrication process to realize the parallel plate structures, the assembly procedure of the measurement setup and some initial characterization results are presented.",

keywords = "IR-79655, METIS-284915, Casimir force, EWI-20737, Micro machining, TST-SENSORS, parallel plate geometry",

author = "\{Syed Nawazuddin\}, M.B. and Lammerink, \{Theodorus S.J.\} and Wiegerink, \{Remco J.\} and Berenschot, \{Johan W.\} and \{de Boer\}, \{Meint J.\} and Elwenspoek, \{Michael Curt\}",

note = "10.1109/TRANSDUCERS.2011.5969571 ; 16th International Solid-State Sensors, Actuators and Microsystems Conference ; Conference date: 05-06-2011 Through 09-06-2011",

year = "2011",

month = aug,

day = "1",

doi = "10.1109/TRANSDUCERS.2011.5969571",

language = "Undefined",

isbn = "978-1-4577-0157-3",

publisher = "IEEE",

pages = "434--437",

booktitle = "Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011",

address = "United States",

url = "http://transducers11-beijing.org/",

}

Syed Nawazuddin, MB, Lammerink, TSJ, Wiegerink, RJ , Berenschot, JW, de Boer, MJ & Elwenspoek, MC 2011, Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. in Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. IEEE, USA, pp. 434-437, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969571

Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. / Syed Nawazuddin, M.B.; Lammerink, Theodorus S.J.; Wiegerink, Remco J. et al.
Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE, 2011. p. 434-437.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

AU - Syed Nawazuddin, M.B.

AU - Lammerink, Theodorus S.J.

AU - Wiegerink, Remco J.

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 16

PY - 2011/8/1

Y1 - 2011/8/1

N2 - Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however measurement of the Casimir force between parallel plates with sub-micron separation distance is still a demanding task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. This paper presents a MEMS chip which is realized to measure the Casimir force between two gold-coated parallel plates at sub-micron distance. The fabrication process to realize the parallel plate structures, the assembly procedure of the measurement setup and some initial characterization results are presented.

AB - Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however measurement of the Casimir force between parallel plates with sub-micron separation distance is still a demanding task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. This paper presents a MEMS chip which is realized to measure the Casimir force between two gold-coated parallel plates at sub-micron distance. The fabrication process to realize the parallel plate structures, the assembly procedure of the measurement setup and some initial characterization results are presented.

KW - IR-79655

KW - METIS-284915

KW - Casimir force

KW - EWI-20737

KW - Micro machining

KW - TST-SENSORS

KW - parallel plate geometry

UR - https://www.scopus.com/pages/publications/80052114481

U2 - 10.1109/TRANSDUCERS.2011.5969571

DO - 10.1109/TRANSDUCERS.2011.5969571

M3 - Conference contribution

SN - 978-1-4577-0157-3

SP - 434

EP - 437

BT - Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011

PB - IEEE

CY - USA

T2 - 16th International Solid-State Sensors, Actuators and Microsystems Conference

Y2 - 5 June 2011 through 9 June 2011

ER -

Syed Nawazuddin MB, Lammerink TSJ, Wiegerink RJ , Berenschot JW, de Boer MJ, Elwenspoek MC. Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In Proceedings of rthe 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011. USA: IEEE. 2011. p. 434-437 doi: 10.1109/TRANSDUCERS.2011.5969571

Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

Other files and links

Cite this