Towards nanogram per second Coriolis mass flow sensing

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Abstract

We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.
Original languageUndefined
Title of host publication29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Place of PublicationUSA
PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
Pages193-196
Number of pages4
ISBN (Print)978-1-5090-1972-4
DOIs
Publication statusPublished - 24 Jan 2016
Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 24 Jan 201628 Jan 2016
Conference number: 29

Publication series

Name
PublisherIEEE Robotics and Automation Society

Conference

Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Abbreviated titleMEMS
CountryChina
CityShanghai
Period24/01/1628/01/16

Keywords

  • EWI-26807
  • IR-100169
  • METIS-316834

Cite this

Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J., & Lötters, J. C. (2016). Towards nanogram per second Coriolis mass flow sensing. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 (pp. 193-196). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. https://doi.org/10.1109/MEMSYS.2016.7421591
Groenesteijn, Jarno ; Sanders, Remco G.P. ; Wiegerink, Remco J. ; Lötters, Joost Conrad. / Towards nanogram per second Coriolis mass flow sensing. 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2016. pp. 193-196
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author = "Jarno Groenesteijn and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",
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isbn = "978-1-5090-1972-4",
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Groenesteijn, J, Sanders, RGP, Wiegerink, RJ & Lötters, JC 2016, Towards nanogram per second Coriolis mass flow sensing. in 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. IEEE ROBOTICS AND AUTOMATION SOCIETY, USA, pp. 193-196, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421591

Towards nanogram per second Coriolis mass flow sensing. / Groenesteijn, Jarno; Sanders, Remco G.P.; Wiegerink, Remco J.; Lötters, Joost Conrad.

29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA : IEEE ROBOTICS AND AUTOMATION SOCIETY, 2016. p. 193-196.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Towards nanogram per second Coriolis mass flow sensing

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AU - Lötters, Joost Conrad

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PY - 2016/1/24

Y1 - 2016/1/24

N2 - We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.

AB - We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.

KW - EWI-26807

KW - IR-100169

KW - METIS-316834

U2 - 10.1109/MEMSYS.2016.7421591

DO - 10.1109/MEMSYS.2016.7421591

M3 - Conference contribution

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BT - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

PB - IEEE ROBOTICS AND AUTOMATION SOCIETY

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Groenesteijn J, Sanders RGP, Wiegerink RJ, Lötters JC. Towards nanogram per second Coriolis mass flow sensing. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. 2016. p. 193-196 https://doi.org/10.1109/MEMSYS.2016.7421591