Towards nanogram per second Coriolis mass flow sensing

Jarno Groenesteijn; Remco G.P. Sanders; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.1109/MEMSYS.2016.7421591

Towards nanogram per second Coriolis mass flow sensing

Jarno Groenesteijn, Remco G.P. Sanders, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

15 Citations (Scopus)

88 Downloads (Pure)

Abstract

We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.

Original language	English
Title of host publication	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Place of Publication	USA
Publisher	IEEE
Pages	193-196
Number of pages	4
ISBN (Electronic)	978-1-5090-1973-1
ISBN (Print)	978-1-5090-1972-4 (USB)
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421591
Publication status	Published - 24 Jan 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 Conference number: 29

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Abbreviated title	MEMS
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

Keywords

22/3 OA procedure

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10.1109/MEMSYS.2016.7421591

ArticleFinal published version, 1.32 MBLicence: Taverne

Cite this

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title = "Towards nanogram per second Coriolis mass flow sensing",

abstract = "We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.",

keywords = "22/3 OA procedure",

author = "Jarno Groenesteijn and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

note = "eemcs-eprint-26807 ; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, MEMS ; Conference date: 24-01-2016 Through 28-01-2016",

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Groenesteijn, J , Sanders, RGP , Wiegerink, RJ & Lötters, JC 2016, Towards nanogram per second Coriolis mass flow sensing. in 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016. IEEE, USA, pp. 193-196, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421591

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AU - Groenesteijn, Jarno

AU - Sanders, Remco G.P.

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AU - Lötters, Joost Conrad

N1 - Conference code: 29

PY - 2016/1/24

Y1 - 2016/1/24

N2 - We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.

AB - We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.

KW - 22/3 OA procedure

U2 - 10.1109/MEMSYS.2016.7421591

DO - 10.1109/MEMSYS.2016.7421591

M3 - Conference contribution

SN - 978-1-5090-1972-4 (USB)

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EP - 196

BT - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

PB - IEEE

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T2 - 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016

Y2 - 24 January 2016 through 28 January 2016

ER -

Towards nanogram per second Coriolis mass flow sensing

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