Abstract
We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.
Original language | English |
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Title of host publication | 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 193-196 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-5090-1973-1 |
ISBN (Print) | 978-1-5090-1972-4 (USB) |
DOIs | |
Publication status | Published - 24 Jan 2016 |
Event | 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016 Conference number: 29 |
Conference
Conference | 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 |
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Abbreviated title | MEMS |
Country/Territory | China |
City | Shanghai |
Period | 24/01/16 → 28/01/16 |
Keywords
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