Towards nanogram per second Coriolis mass flow sensing

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    Abstract

    We have designed, fabricated and tested a micromachined Coriolis flow sensor which can measure up to 50µg/s at a maximum pressure drop of 1bar with a zero stability of 14ng/s, an improvement by a factor 40 compared to current state of the art Coriolis flow sensors. This resolution opens up new fields of applications which could up to now not be measured with Coriolis flow sensors.
    Original languageUndefined
    Title of host publication29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
    Place of PublicationUSA
    PublisherIEEE ROBOTICS AND AUTOMATION SOCIETY
    Pages193-196
    Number of pages4
    ISBN (Print)978-1-5090-1972-4
    DOIs
    Publication statusPublished - 24 Jan 2016
    Event29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
    Duration: 24 Jan 201628 Jan 2016
    Conference number: 29

    Publication series

    Name
    PublisherIEEE Robotics and Automation Society

    Conference

    Conference29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
    Abbreviated titleMEMS
    CountryChina
    CityShanghai
    Period24/01/1628/01/16

    Keywords

    • EWI-26807
    • IR-100169
    • METIS-316834

    Cite this

    Groenesteijn, J., Sanders, R. G. P., Wiegerink, R. J., & Lötters, J. C. (2016). Towards nanogram per second Coriolis mass flow sensing. In 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 (pp. 193-196). USA: IEEE ROBOTICS AND AUTOMATION SOCIETY. https://doi.org/10.1109/MEMSYS.2016.7421591