Towards position control of electrostatic comb drives

R. Legtenberg, A.W. Groeneveld, M. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationThe Sixth Micromechanics Europe Workshop, MME '95
    Subtitle of host publication3-5 September 1995, Copenhagen, Denmark : proceedings
    Place of PublicationLyngby
    PublisherDanmarks Tekniske Universitet
    Pages124-127
    ISBN (Print)9788789935003
    Publication statusPublished - 26 Mar 1995
    Event6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark
    Duration: 3 Sep 19955 Sep 1995
    Conference number: 6

    Conference

    Conference6th Micromechanics Europe Workshop, MME 1995
    Abbreviated titleMME
    CountryDenmark
    CityCopenhagen
    Period3/09/955/09/95

    Keywords

    • METIS-112907
    • IR-16025

    Cite this

    Legtenberg, R., Groeneveld, A. W., & Elwenspoek, M. (1995). Towards position control of electrostatic comb drives. In The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings (pp. 124-127). Lyngby: Danmarks Tekniske Universitet.