Towards position control of electrostatic comb drives

R. Legtenberg; A.W. Groeneveld; M. Elwenspoek

Towards position control of electrostatic comb drives

R. Legtenberg, A.W. Groeneveld, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	The Sixth Micromechanics Europe Workshop, MME '95
Subtitle of host publication	3-5 September 1995, Copenhagen, Denmark : proceedings
Place of Publication	Lyngby
Publisher	Danmarks Tekniske Universitet
Pages	124-127
ISBN (Print)	9788789935003
Publication status	Published - 26 Mar 1995
Event	6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark Duration: 3 Sept 1995 → 5 Sept 1995 Conference number: 6

Conference

Conference	6th Micromechanics Europe Workshop, MME 1995
Abbreviated title	MME
Country/Territory	Denmark
City	Copenhagen
Period	3/09/95 → 5/09/95

Keywords

METIS-112907
IR-16025

Cite this

@inproceedings{1702111128664f818f9ceb07c4c66c11,

title = "Towards position control of electrostatic comb drives",

keywords = "METIS-112907, IR-16025",

author = "R. Legtenberg and A.W. Groeneveld and M. Elwenspoek",

year = "1995",

month = mar,

day = "26",

language = "English",

isbn = "9788789935003",

pages = "124--127",

booktitle = "The Sixth Micromechanics Europe Workshop, MME '95",

publisher = "Danmarks Tekniske Universitet",

note = "6th Micromechanics Europe Workshop, MME 1995, MME ; Conference date: 03-09-1995 Through 05-09-1995",

}

Towards position control of electrostatic comb drives. / Legtenberg, R.; Groeneveld, A.W.; Elwenspoek, M.
The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings. Lyngby: Danmarks Tekniske Universitet, 1995. p. 124-127.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Towards position control of electrostatic comb drives

AU - Legtenberg, R.

AU - Groeneveld, A.W.

AU - Elwenspoek, M.

N1 - Conference code: 6

PY - 1995/3/26

Y1 - 1995/3/26

KW - METIS-112907

KW - IR-16025

M3 - Conference contribution

SN - 9788789935003

SP - 124

EP - 127

BT - The Sixth Micromechanics Europe Workshop, MME '95

PB - Danmarks Tekniske Universitet

CY - Lyngby

T2 - 6th Micromechanics Europe Workshop, MME 1995

Y2 - 3 September 1995 through 5 September 1995

ER -