Towards position control of electrostatic comb drives

R. Legtenberg, A.W. Groeneveld, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationThe Sixth Micromechanics Europe Workshop, MME '95
Subtitle of host publication3-5 September 1995, Copenhagen, Denmark : proceedings
Place of PublicationLyngby
PublisherDanmarks Tekniske Universitet
Pages124-127
ISBN (Print)9788789935003
Publication statusPublished - 26 Mar 1995
Event6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark
Duration: 3 Sep 19955 Sep 1995
Conference number: 6

Conference

Conference6th Micromechanics Europe Workshop, MME 1995
Abbreviated titleMME
CountryDenmark
CityCopenhagen
Period3/09/955/09/95

Keywords

  • METIS-112907
  • IR-16025

Cite this

Legtenberg, R., Groeneveld, A. W., & Elwenspoek, M. (1995). Towards position control of electrostatic comb drives. In The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings (pp. 124-127). Lyngby: Danmarks Tekniske Universitet.
Legtenberg, R. ; Groeneveld, A.W. ; Elwenspoek, M. / Towards position control of electrostatic comb drives. The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings. Lyngby : Danmarks Tekniske Universitet, 1995. pp. 124-127
@inproceedings{1702111128664f818f9ceb07c4c66c11,
title = "Towards position control of electrostatic comb drives",
keywords = "METIS-112907, IR-16025",
author = "R. Legtenberg and A.W. Groeneveld and M. Elwenspoek",
year = "1995",
month = "3",
day = "26",
language = "English",
isbn = "9788789935003",
pages = "124--127",
booktitle = "The Sixth Micromechanics Europe Workshop, MME '95",
publisher = "Danmarks Tekniske Universitet",

}

Legtenberg, R, Groeneveld, AW & Elwenspoek, M 1995, Towards position control of electrostatic comb drives. in The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings. Danmarks Tekniske Universitet, Lyngby, pp. 124-127, 6th Micromechanics Europe Workshop, MME 1995, Copenhagen, Denmark, 3/09/95.

Towards position control of electrostatic comb drives. / Legtenberg, R.; Groeneveld, A.W.; Elwenspoek, M.

The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings. Lyngby : Danmarks Tekniske Universitet, 1995. p. 124-127.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Towards position control of electrostatic comb drives

AU - Legtenberg, R.

AU - Groeneveld, A.W.

AU - Elwenspoek, M.

PY - 1995/3/26

Y1 - 1995/3/26

KW - METIS-112907

KW - IR-16025

M3 - Conference contribution

SN - 9788789935003

SP - 124

EP - 127

BT - The Sixth Micromechanics Europe Workshop, MME '95

PB - Danmarks Tekniske Universitet

CY - Lyngby

ER -

Legtenberg R, Groeneveld AW, Elwenspoek M. Towards position control of electrostatic comb drives. In The Sixth Micromechanics Europe Workshop, MME '95: 3-5 September 1995, Copenhagen, Denmark : proceedings. Lyngby: Danmarks Tekniske Universitet. 1995. p. 124-127