Transduction mechanisms and their applications in micromechanical devices

M. Elwenspoek; F.R. Blom; S. Bouwstra; T.S.J. Lammerink; F.C.M. van de Pol; H.A.C. Tilmans; Th.J.A. Popma; J.H.J. Fluitman

doi:10.1109/MEMSYS.1989.77976

Transduction mechanisms and their applications in micromechanical devices

M. Elwenspoek, F.R. Blom, S. Bouwstra, T.S.J. Lammerink, F.C.M. van de Pol, H.A.C. Tilmans, Th.J.A. Popma, J.H.J. Fluitman

Research output: Contribution to conference › Paper › Academic

17 Citations (Scopus)

102 Downloads (Pure)

Abstract

Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed

Original language	English
Pages	126-132
DOIs	https://doi.org/10.1109/MEMSYS.1989.77976
Publication status	Published - 1989
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989 - Salt Lake City, United States Duration: 20 Feb 1989 → 22 Feb 1989

Other

Other	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989
Abbreviated title	MEMS
Country	United States
City	Salt Lake City
Period	20/02/89 → 22/02/89

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10.1109/MEMSYS.1989.77976

Elwenspoek1989transduction
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Elwenspoek, M., Blom, F. R., Bouwstra, S., Lammerink, T. S. J., van de Pol, F. C. M., Tilmans, H. A. C., Popma, T. J. A., & Fluitman, J. H. J. (1989). Transduction mechanisms and their applications in micromechanical devices. 126-132. Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, United States. https://doi.org/10.1109/MEMSYS.1989.77976

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title = "Transduction mechanisms and their applications in micromechanical devices",

abstract = "Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed",

author = "M. Elwenspoek and F.R. Blom and S. Bouwstra and T.S.J. Lammerink and {van de Pol}, F.C.M. and H.A.C. Tilmans and Th.J.A. Popma and J.H.J. Fluitman",

year = "1989",

doi = "10.1109/MEMSYS.1989.77976",

language = "English",

pages = "126--132",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, MEMS ; Conference date: 20-02-1989 Through 22-02-1989",

}

Elwenspoek, M, Blom, FR, Bouwstra, S, Lammerink, TSJ, van de Pol, FCM, Tilmans, HAC, Popma, TJA & Fluitman, JHJ 1989, 'Transduction mechanisms and their applications in micromechanical devices', Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, United States, 20/02/89 - 22/02/89 pp. 126-132. https://doi.org/10.1109/MEMSYS.1989.77976

Transduction mechanisms and their applications in micromechanical devices. / Elwenspoek, M.; Blom, F.R.; Bouwstra, S.; Lammerink, T.S.J.; van de Pol, F.C.M.; Tilmans, H.A.C.; Popma, Th.J.A.; Fluitman, J.H.J.

1989. 126-132 Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, United States.

Research output: Contribution to conference › Paper › Academic

TY - CONF

T1 - Transduction mechanisms and their applications in micromechanical devices

AU - Elwenspoek, M.

AU - Blom, F.R.

AU - Bouwstra, S.

AU - Lammerink, T.S.J.

AU - van de Pol, F.C.M.

AU - Tilmans, H.A.C.

AU - Popma, Th.J.A.

AU - Fluitman, J.H.J.

PY - 1989

Y1 - 1989

N2 - Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed

AB - Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed

U2 - 10.1109/MEMSYS.1989.77976

DO - 10.1109/MEMSYS.1989.77976

M3 - Paper

SP - 126

EP - 132

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989

Y2 - 20 February 1989 through 22 February 1989

ER -