Transduction mechanisms and their applications in micromechanical devices

M. Elwenspoek, F.R. Blom, S. Bouwstra, T.S.J. Lammerink, F.C.M. van de Pol, H.A.C. Tilmans, Th.J.A. Popma, J.H.J. Fluitman

    Research output: Contribution to conferencePaper

    17 Citations (Scopus)
    86 Downloads (Pure)

    Abstract

    Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed
    Original languageEnglish
    Pages126-132
    DOIs
    Publication statusPublished - 1989
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989 - Salt Lake City, United States
    Duration: 20 Feb 198922 Feb 1989

    Other

    OtherIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989
    Abbreviated titleMEMS
    CountryUnited States
    CitySalt Lake City
    Period20/02/8922/02/89

    Fingerprint Dive into the research topics of 'Transduction mechanisms and their applications in micromechanical devices'. Together they form a unique fingerprint.

  • Cite this

    Elwenspoek, M., Blom, F. R., Bouwstra, S., Lammerink, T. S. J., van de Pol, F. C. M., Tilmans, H. A. C., ... Fluitman, J. H. J. (1989). Transduction mechanisms and their applications in micromechanical devices. 126-132. Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, United States. https://doi.org/10.1109/MEMSYS.1989.77976