Transduction mechanisms and their applications in micromechanical devices

M. Elwenspoek, F.R. Blom, S. Bouwstra, T.S.J. Lammerink, F.C.M. van de Pol, H.A.C. Tilmans, Th.J.A. Popma, J.H.J. Fluitman

    Research output: Contribution to conferencePaperAcademic

    17 Citations (Scopus)
    102 Downloads (Pure)

    Abstract

    Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed
    Original languageEnglish
    Pages126-132
    DOIs
    Publication statusPublished - 1989
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989 - Salt Lake City, United States
    Duration: 20 Feb 198922 Feb 1989

    Other

    OtherIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989
    Abbreviated titleMEMS
    CountryUnited States
    CitySalt Lake City
    Period20/02/8922/02/89

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