Transduction mechanisms and their applications in micromechanical devices

M. Elwenspoek; F.R. Blom; S. Bouwstra; T.S.J. Lammerink; F.C.M. van de Pol; H.A.C. Tilmans; Th.J.A. Popma; J.H.J. Fluitman

doi:10.1109/MEMSYS.1989.77976

Transduction mechanisms and their applications in micromechanical devices

M. Elwenspoek, F.R. Blom, S. Bouwstra, T.S.J. Lammerink, F.C.M. van de Pol, H.A.C. Tilmans, Th.J.A. Popma, J.H.J. Fluitman

Research output: Contribution to conference › Paper › Academic

17 Citations (Scopus)

205 Downloads (Pure)

Abstract

Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed

Original language	English
Pages	126-132
DOIs	https://doi.org/10.1109/MEMSYS.1989.77976
Publication status	Published - 1989
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989 - Salt Lake City, United States Duration: 20 Feb 1989 → 22 Feb 1989

Other

Other	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989
Abbreviated title	MEMS
Country/Territory	United States
City	Salt Lake City
Period	20/02/89 → 22/02/89

Access to Document

10.1109/MEMSYS.1989.77976

Elwenspoek1989transductionFinal published version, 477 KB

Cite this

Elwenspoek, M., Blom, F. R., Bouwstra, S., Lammerink, T. S. J., van de Pol, F. C. M., Tilmans, H. A. C., Popma, T. J. A., & Fluitman, J. H. J. (1989). Transduction mechanisms and their applications in micromechanical devices. 126-132. Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, Utah, United States. https://doi.org/10.1109/MEMSYS.1989.77976

@conference{3e29d88578b04e4795bf189925e2ffe7,

title = "Transduction mechanisms and their applications in micromechanical devices",

abstract = "Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed",

author = "M. Elwenspoek and F.R. Blom and S. Bouwstra and T.S.J. Lammerink and {van de Pol}, F.C.M. and H.A.C. Tilmans and Th.J.A. Popma and J.H.J. Fluitman",

year = "1989",

doi = "10.1109/MEMSYS.1989.77976",

language = "English",

pages = "126--132",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, MEMS ; Conference date: 20-02-1989 Through 22-02-1989",

}

Elwenspoek, M, Blom, FR, Bouwstra, S, Lammerink, TSJ, van de Pol, FCM, Tilmans, HAC, Popma, TJA & Fluitman, JHJ 1989, 'Transduction mechanisms and their applications in micromechanical devices', Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, United States, 20/02/89 - 22/02/89 pp. 126-132. https://doi.org/10.1109/MEMSYS.1989.77976

Transduction mechanisms and their applications in micromechanical devices. / Elwenspoek, M.; Blom, F.R.; Bouwstra, S.; Lammerink, T.S.J.; van de Pol, F.C.M.; Tilmans, H.A.C.; Popma, Th.J.A.; Fluitman, J.H.J.

1989. 126-132 Paper presented at IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989, Salt Lake City, Utah, United States.

Research output: Contribution to conference › Paper › Academic

TY - CONF

T1 - Transduction mechanisms and their applications in micromechanical devices

AU - Elwenspoek, M.

AU - Blom, F.R.

AU - Bouwstra, S.

AU - Lammerink, T.S.J.

AU - van de Pol, F.C.M.

AU - Tilmans, H.A.C.

AU - Popma, Th.J.A.

AU - Fluitman, J.H.J.

PY - 1989

Y1 - 1989

N2 - Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed

AB - Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed

U2 - 10.1109/MEMSYS.1989.77976

DO - 10.1109/MEMSYS.1989.77976

M3 - Paper

SP - 126

EP - 132

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989

Y2 - 20 February 1989 through 22 February 1989

ER -

Transduction mechanisms and their applications in micromechanical devices

Abstract

Other

Access to Document

Fingerprint

Cite this