Abstract
Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed
Original language | English |
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Pages | 126-132 |
DOIs | |
Publication status | Published - 1989 |
Event | IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989 - Salt Lake City, United States Duration: 20 Feb 1989 → 22 Feb 1989 |
Other
Other | IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1989 |
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Abbreviated title | MEMS |
Country/Territory | United States |
City | Salt Lake City |
Period | 20/02/89 → 22/02/89 |