Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects

M.H.H. Oude nijhuis, T.G.H. Basten, Y.H. Wijnant, H. Tijdeman, H.A.C. Tilmans

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Abstract

The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement.
Original languageEnglish
Title of host publicationProceedings Eurosensors XIII
Place of PublicationThe Hague, The Netherlands
Number of pages4
Publication statusPublished - 26 Jan 1999
Event13th European Conference on Solid-State Transducers, EUROSENSORS XIII - The Hague, The Netherlands, Den Haag
Duration: 12 Sep 199915 Sep 1999

Conference

Conference13th European Conference on Solid-State Transducers, EUROSENSORS XIII
CityDen Haag
Period12/09/9915/09/99
OtherSeptember 12-15, 1999

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