Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects

M.H.H. Oude Nijhuis; T.G.H. Basten; Y.H. Wijnant; H. Tijdeman; H.A.C. Tilmans

Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects

M.H.H. Oude Nijhuis, T.G.H. Basten, Y.H. Wijnant, H. Tijdeman, H.A.C. Tilmans

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

80 Downloads (Pure)

Abstract

The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement.

Original language	English
Title of host publication	Proceedings Eurosensors XIII
Place of Publication	The Hague, The Netherlands
Number of pages	4
Publication status	Published - 26 Jan 1999
Event	13th European Conference on Solid-State Transducers, EUROSENSORS XIII - The Hague, The Netherlands, Den Haag Duration: 12 Sept 1999 → 15 Sept 1999

Conference

Conference	13th European Conference on Solid-State Transducers, EUROSENSORS XIII
City	Den Haag
Period	12/09/99 → 15/09/99
Other	September 12-15, 1999

Access to Document

OudeNijhuis1999_transientFinal published version, 305 KB

Cite this

@inproceedings{9b764c5eba3648ca98bfcb6661bb90d9,

title = "Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects",

abstract = "The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement.",

author = "{Oude Nijhuis}, M.H.H. and T.G.H. Basten and Y.H. Wijnant and H. Tijdeman and H.A.C. Tilmans",

note = "CD-ROM; 13th European Conference on Solid-State Transducers, EUROSENSORS XIII ; Conference date: 12-09-1999 Through 15-09-1999",

year = "1999",

month = jan,

day = "26",

language = "English",

isbn = "90-76699-02-X",

booktitle = "Proceedings Eurosensors XIII",

}

TY - GEN

T1 - Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects

AU - Oude Nijhuis, M.H.H.

AU - Basten, T.G.H.

AU - Wijnant, Y.H.

AU - Tijdeman, H.

AU - Tilmans, H.A.C.

N1 - CD-ROM

PY - 1999/1/26

Y1 - 1999/1/26

N2 - The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement.

AB - The dynamic behaviour of “pull-in MEMS devices” including a squeeze film is described by non-linear differential equations that are solved numerically. The pull-in time of a basic parallel plate structure as a function of the ambient pressure, external driving force and plate length/width ratio has been simulated for single- and double-gap configurations. It has been found that the pull-in time can be greatly reduced by lowering the ambient pressure and/or by increasing the driving force. The model has been applied to predict the operate time of an electromagnetic microrelay. Measurements and simulations show good agreement.

M3 - Conference contribution

SN - 90-76699-02-X

BT - Proceedings Eurosensors XIII

CY - The Hague, The Netherlands

T2 - 13th European Conference on Solid-State Transducers, EUROSENSORS XIII

Y2 - 12 September 1999 through 15 September 1999

ER -

Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects

Abstract

Conference

Access to Document

Fingerprint

Cite this