Transient rapid thermal annealing (T-RTA) for low-dose high-energy phosphorus implants

Research output: Contribution to conference › Poster › Other research output

Original language	English
Pages	-
Publication status	Published - 29 Nov 1990
Event	FOM Werkgemeenschap Halfgeleiders 1990 - Veldhoven, Netherlands Duration: 28 Nov 1990 → 29 Nov 1990

Conference	FOM Werkgemeenschap Halfgeleiders 1990
Country/Territory	Netherlands
City	Veldhoven
Period	28/11/90 → 29/11/90

Keywords

@conference{dc22ce584e474d3da61a586e9df24d4f,

title = "Transient rapid thermal annealing (T-RTA) for low-dose high-energy phosphorus implants",

keywords = "METIS-117182",

author = "J.L.P. Heideman and I. Barsony and J. Middelhoek and Hans Wallinga",

year = "1990",

month = nov,

day = "29",

language = "English",

pages = "--",

note = "FOM Werkgemeenschap Halfgeleiders 1990 ; Conference date: 28-11-1990 Through 29-11-1990",

}