Transient RTA of low-dose high energy phosphorus implanted silicon

I. Barsony, J.L.P. Heideman, J. Middelhoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Extended abstracts 22nd Conference on Solid-State Devices and Materials
Place of Publication	Sendai, Japan
Pages	437-440
Number of pages	4
Publication status	Published - 22 Aug 1990

Keywords

@inproceedings{3b13096133af4db3a1ceb450fe373944,

title = "Transient RTA of low-dose high energy phosphorus implanted silicon",

keywords = "METIS-114023",

author = "I. Barsony and J.L.P. Heideman and J. Middelhoek",

year = "1990",

month = aug,

day = "22",

language = "Undefined",

pages = "437--440",

booktitle = "Extended abstracts 22nd Conference on Solid-State Devices and Materials",

}