Transition flow through an ultra-thin nanosieve

S. Unnikrishnan, Henricus V. Jansen, F.H. Falke, Niels Roelof Tas, Hendricus A.G.M. van Wolferen, Meint J. de Boer, Remco G.P. Sanders, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

11 Citations (Scopus)

Abstract

The fabrication and gas flow characterization of an ultra-thin inorganic nanosieve structured by interference lithography and a bond-micromachining approach are reported. The nanosieve has been observed to exhibit transition gas flow behaviour around atmospheric pressure and ambient temperature. The small lip thickness (45 nm) of the nanopores with respect to their diameter (120 nm) helps in understanding pure transition flow by minimizing interactions between the molecule and inner pore wall. Due to the absence of these collisions, the transition flux is the superimposition of viscous and molecular fluxes without the need for higher-order slip correction. The nanosieve shows a flow selectivity of 3.1 between helium and argon at 20 mbar.
Original languageUndefined
Article number10.1088/0957-4484/20/30/305304
Pages (from-to)1-6
Number of pages6
JournalNanotechnology
Volume20
Issue number30
DOIs
Publication statusPublished - 7 Jul 2009

Keywords

  • EWI-16481
  • IR-68364
  • METIS-264138

Cite this

Unnikrishnan, S., Jansen, H. V., Falke, F. H., Tas, N. R., van Wolferen, H. A. G. M., de Boer, M. J., ... Elwenspoek, M. C. (2009). Transition flow through an ultra-thin nanosieve. Nanotechnology, 20(30), 1-6. [10.1088/0957-4484/20/30/305304]. https://doi.org/10.1088/0957-4484/20/30/305304
Unnikrishnan, S. ; Jansen, Henricus V. ; Falke, F.H. ; Tas, Niels Roelof ; van Wolferen, Hendricus A.G.M. ; de Boer, Meint J. ; Sanders, Remco G.P. ; Elwenspoek, Michael Curt. / Transition flow through an ultra-thin nanosieve. In: Nanotechnology. 2009 ; Vol. 20, No. 30. pp. 1-6.
@article{a4959c91f2dd41a491d4945ee1703411,
title = "Transition flow through an ultra-thin nanosieve",
abstract = "The fabrication and gas flow characterization of an ultra-thin inorganic nanosieve structured by interference lithography and a bond-micromachining approach are reported. The nanosieve has been observed to exhibit transition gas flow behaviour around atmospheric pressure and ambient temperature. The small lip thickness (45 nm) of the nanopores with respect to their diameter (120 nm) helps in understanding pure transition flow by minimizing interactions between the molecule and inner pore wall. Due to the absence of these collisions, the transition flux is the superimposition of viscous and molecular fluxes without the need for higher-order slip correction. The nanosieve shows a flow selectivity of 3.1 between helium and argon at 20 mbar.",
keywords = "EWI-16481, IR-68364, METIS-264138",
author = "S. Unnikrishnan and Jansen, {Henricus V.} and F.H. Falke and Tas, {Niels Roelof} and {van Wolferen}, {Hendricus A.G.M.} and {de Boer}, {Meint J.} and Sanders, {Remco G.P.} and Elwenspoek, {Michael Curt}",
note = "10.1088/0957-4484/20/30/305304",
year = "2009",
month = "7",
day = "7",
doi = "10.1088/0957-4484/20/30/305304",
language = "Undefined",
volume = "20",
pages = "1--6",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "30",

}

Unnikrishnan, S, Jansen, HV, Falke, FH, Tas, NR, van Wolferen, HAGM, de Boer, MJ, Sanders, RGP & Elwenspoek, MC 2009, 'Transition flow through an ultra-thin nanosieve' Nanotechnology, vol. 20, no. 30, 10.1088/0957-4484/20/30/305304, pp. 1-6. https://doi.org/10.1088/0957-4484/20/30/305304

Transition flow through an ultra-thin nanosieve. / Unnikrishnan, S.; Jansen, Henricus V.; Falke, F.H.; Tas, Niels Roelof; van Wolferen, Hendricus A.G.M.; de Boer, Meint J.; Sanders, Remco G.P.; Elwenspoek, Michael Curt.

In: Nanotechnology, Vol. 20, No. 30, 10.1088/0957-4484/20/30/305304, 07.07.2009, p. 1-6.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Transition flow through an ultra-thin nanosieve

AU - Unnikrishnan, S.

AU - Jansen, Henricus V.

AU - Falke, F.H.

AU - Tas, Niels Roelof

AU - van Wolferen, Hendricus A.G.M.

AU - de Boer, Meint J.

AU - Sanders, Remco G.P.

AU - Elwenspoek, Michael Curt

N1 - 10.1088/0957-4484/20/30/305304

PY - 2009/7/7

Y1 - 2009/7/7

N2 - The fabrication and gas flow characterization of an ultra-thin inorganic nanosieve structured by interference lithography and a bond-micromachining approach are reported. The nanosieve has been observed to exhibit transition gas flow behaviour around atmospheric pressure and ambient temperature. The small lip thickness (45 nm) of the nanopores with respect to their diameter (120 nm) helps in understanding pure transition flow by minimizing interactions between the molecule and inner pore wall. Due to the absence of these collisions, the transition flux is the superimposition of viscous and molecular fluxes without the need for higher-order slip correction. The nanosieve shows a flow selectivity of 3.1 between helium and argon at 20 mbar.

AB - The fabrication and gas flow characterization of an ultra-thin inorganic nanosieve structured by interference lithography and a bond-micromachining approach are reported. The nanosieve has been observed to exhibit transition gas flow behaviour around atmospheric pressure and ambient temperature. The small lip thickness (45 nm) of the nanopores with respect to their diameter (120 nm) helps in understanding pure transition flow by minimizing interactions between the molecule and inner pore wall. Due to the absence of these collisions, the transition flux is the superimposition of viscous and molecular fluxes without the need for higher-order slip correction. The nanosieve shows a flow selectivity of 3.1 between helium and argon at 20 mbar.

KW - EWI-16481

KW - IR-68364

KW - METIS-264138

U2 - 10.1088/0957-4484/20/30/305304

DO - 10.1088/0957-4484/20/30/305304

M3 - Article

VL - 20

SP - 1

EP - 6

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 30

M1 - 10.1088/0957-4484/20/30/305304

ER -

Unnikrishnan S, Jansen HV, Falke FH, Tas NR, van Wolferen HAGM, de Boer MJ et al. Transition flow through an ultra-thin nanosieve. Nanotechnology. 2009 Jul 7;20(30):1-6. 10.1088/0957-4484/20/30/305304. https://doi.org/10.1088/0957-4484/20/30/305304