Transmission grating spectrometer for broadband characterization of EUV sources

Research output: Contribution to conferencePosterOther research output

Abstract

Emission from extreme ultraviolet (EUV) light sources for lithography and metrology applications needs to be maximized in a narrow wavelength band. On the other hand, these sources also emit radiation outside this wavelength band, extending into the deep ultraviolet (DUV) and visible/IR range. To gain a comprehensive understanding of the source conditions, characterization of the in-band as well as the ouf-of-band radiation is needed. Here, we present a broadband spectrometer based on a set of free-standing transmission gratings. The spectrometer combines, high (up to 10,000 lines/mm) and low line density gratings that enable recording of the source spectrum with high resolution and also in a wide bandwidth extending beyond the DUV wavelengths. Compared to a reflective grating configuration, the transmission geometry enables the design to be more compact, and the alignment and calibration to be more straightforward. The components in the spectrometer are controlled by motorized stages that enable adjusting spectral resolution and spectral range without breaking vacuum. We present measurements that were carried out at different types of EUV sources and at various spectral ranges. The measurements provide comprehensive spectral information that is directly available for analysis and optimization of the source conditions.
Original languageEnglish
Pages-
Publication statusPublished - 7 Nov 2016
Event2016 International Workshop on EUV and Soft X-Ray Sources - Amsterdam, Netherlands
Duration: 7 Nov 20169 Nov 2016
https://euvlitho.com/source-workshop/2016-international-workshop-on-euv-and-soft-x-ray-sources/

Workshop

Workshop2016 International Workshop on EUV and Soft X-Ray Sources
CountryNetherlands
CityAmsterdam
Period7/11/169/11/16
Internet address

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gratings
spectrometers
broadband
wavelengths
radiation
ultraviolet radiation
spectral resolution
metrology
light sources
lithography
adjusting
recording
alignment
bandwidth
vacuum
optimization
high resolution
geometry
configurations

Keywords

  • METIS-319124

Cite this

Bayraktar, M., Bastiaens, H. M. J., Bruineman, C., Vratzov, B., & Bijkerk, F. (2016). Transmission grating spectrometer for broadband characterization of EUV sources. -. Poster session presented at 2016 International Workshop on EUV and Soft X-Ray Sources, Amsterdam, Netherlands.
Bayraktar, Muharrem ; Bastiaens, Hubertus M.J. ; Bruineman, C. ; Vratzov, B. ; Bijkerk, Frederik. / Transmission grating spectrometer for broadband characterization of EUV sources. Poster session presented at 2016 International Workshop on EUV and Soft X-Ray Sources, Amsterdam, Netherlands.
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note = "2016 International Workshop on EUV and Soft X-Ray Sources ; Conference date: 07-11-2016 Through 09-11-2016",
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Bayraktar, M, Bastiaens, HMJ, Bruineman, C, Vratzov, B & Bijkerk, F 2016, 'Transmission grating spectrometer for broadband characterization of EUV sources' 2016 International Workshop on EUV and Soft X-Ray Sources, Amsterdam, Netherlands, 7/11/16 - 9/11/16, pp. -.

Transmission grating spectrometer for broadband characterization of EUV sources. / Bayraktar, Muharrem; Bastiaens, Hubertus M.J.; Bruineman, C.; Vratzov, B.; Bijkerk, Frederik.

2016. - Poster session presented at 2016 International Workshop on EUV and Soft X-Ray Sources, Amsterdam, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Transmission grating spectrometer for broadband characterization of EUV sources

AU - Bayraktar, Muharrem

AU - Bastiaens, Hubertus M.J.

AU - Bruineman, C.

AU - Vratzov, B.

AU - Bijkerk, Frederik

PY - 2016/11/7

Y1 - 2016/11/7

N2 - Emission from extreme ultraviolet (EUV) light sources for lithography and metrology applications needs to be maximized in a narrow wavelength band. On the other hand, these sources also emit radiation outside this wavelength band, extending into the deep ultraviolet (DUV) and visible/IR range. To gain a comprehensive understanding of the source conditions, characterization of the in-band as well as the ouf-of-band radiation is needed. Here, we present a broadband spectrometer based on a set of free-standing transmission gratings. The spectrometer combines, high (up to 10,000 lines/mm) and low line density gratings that enable recording of the source spectrum with high resolution and also in a wide bandwidth extending beyond the DUV wavelengths. Compared to a reflective grating configuration, the transmission geometry enables the design to be more compact, and the alignment and calibration to be more straightforward. The components in the spectrometer are controlled by motorized stages that enable adjusting spectral resolution and spectral range without breaking vacuum. We present measurements that were carried out at different types of EUV sources and at various spectral ranges. The measurements provide comprehensive spectral information that is directly available for analysis and optimization of the source conditions.

AB - Emission from extreme ultraviolet (EUV) light sources for lithography and metrology applications needs to be maximized in a narrow wavelength band. On the other hand, these sources also emit radiation outside this wavelength band, extending into the deep ultraviolet (DUV) and visible/IR range. To gain a comprehensive understanding of the source conditions, characterization of the in-band as well as the ouf-of-band radiation is needed. Here, we present a broadband spectrometer based on a set of free-standing transmission gratings. The spectrometer combines, high (up to 10,000 lines/mm) and low line density gratings that enable recording of the source spectrum with high resolution and also in a wide bandwidth extending beyond the DUV wavelengths. Compared to a reflective grating configuration, the transmission geometry enables the design to be more compact, and the alignment and calibration to be more straightforward. The components in the spectrometer are controlled by motorized stages that enable adjusting spectral resolution and spectral range without breaking vacuum. We present measurements that were carried out at different types of EUV sources and at various spectral ranges. The measurements provide comprehensive spectral information that is directly available for analysis and optimization of the source conditions.

KW - METIS-319124

M3 - Poster

SP - -

ER -

Bayraktar M, Bastiaens HMJ, Bruineman C, Vratzov B, Bijkerk F. Transmission grating spectrometer for broadband characterization of EUV sources. 2016. Poster session presented at 2016 International Workshop on EUV and Soft X-Ray Sources, Amsterdam, Netherlands.