Transmission grating spectroscopy in the EUV and VUV

Hubertus M.J. Bastiaens, C. Bruineman, B. Vratzov, Eric Louis, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 6 Oct 2013
Event	Sematech: Tertiary Transmission grating spectroscopy in the EUV and VUV - Toyama, Japan Duration: 6 Oct 2013 → …

Keywords

@conference{c95272c86cb145b6973113991c5816cd,

title = "Transmission grating spectroscopy in the EUV and VUV",

keywords = "METIS-299654",

author = "Bastiaens, {Hubertus M.J.} and C. Bruineman and B. Vratzov and Eric Louis and Frederik Bijkerk",

year = "2013",

month = oct,

day = "6",

language = "Undefined",

pages = "--",

note = "Sematech ; Conference date: 06-10-2013",

}