Trapping in Capacitive MEMS Structures

M.C. van Essen, Remco J. Wiegerink, Herbert Wormeester, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 23 Jan 2007
EventPoster, presented at the FOM days - Veldhoven
Duration: 23 Jan 200724 Jan 2007

Conference

ConferencePoster, presented at the FOM days
CityVeldhoven
Period23/01/0724/01/07

Keywords

  • METIS-243149

Cite this