Trapping in Capacitive MEMS Structures

M.C. van Essen, Remco J. Wiegerink, Herbert Wormeester, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 23 Jan 2007

Keywords

  • METIS-243149

Cite this

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title = "Trapping in Capacitive MEMS Structures",
keywords = "METIS-243149",
author = "{van Essen}, M.C. and Wiegerink, {Remco J.} and Herbert Wormeester and Horst Rogalla and Jakob Flokstra",
year = "2007",
month = "1",
day = "23",
language = "Undefined",
pages = "--",

}

Trapping in Capacitive MEMS Structures. / van Essen, M.C.; Wiegerink, Remco J.; Wormeester, Herbert; Rogalla, Horst; Flokstra, Jakob.

2007. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Trapping in Capacitive MEMS Structures

AU - van Essen, M.C.

AU - Wiegerink, Remco J.

AU - Wormeester, Herbert

AU - Rogalla, Horst

AU - Flokstra, Jakob

PY - 2007/1/23

Y1 - 2007/1/23

KW - METIS-243149

M3 - Poster

SP - -

ER -