@inproceedings{0aa8c21f0a2642989f8587ee8e6c124c,
title = "TriPleX tm platform technology for photonic integration: applications from UV through NIR to IR",
abstract = "echnology [1] of LioniX has been further developed and has become one of the three main integrated optical platforms (besides InP and SOI) in the Netherlands [2]. TriPleXTM structures are realized with CMOS compatible fabrication equipment and the materials used are based on chemical endproducts of LPCVD processes, resulting in very reproducible material properties, allowing design by geometry. The basic concept of a TriPleXTM waveguide consists of a multilayer stack of stochiometric silicon nitride and silicon oxide. These materials have and opposite stress when deposited on a silicon wafer (nitride is tensile and oxide is compressive) and stacking them in a multilayer results in a macroscopically low stress layer stack.",
keywords = "METIS-279179, EWI-20512, IR-78056",
author = "Arne Leinse and Rene Heideman and E.J. Klein and R. Dekker and C.G.H. Roeloffzen and D.A.I. Marpaung",
year = "2011",
month = may,
day = "19",
doi = "10.1109/ICO-IP.2011.5953782",
language = "Undefined",
isbn = "978-1-61284-315-5",
publisher = "IEEE Antennas & Propagation Society",
pages = "1--2",
booktitle = "2011 ICO International Conference on Information Photonics (IP2011)",
note = "null ; Conference date: 18-05-2011 Through 20-05-2011",
}