Truly calorimetric flow sensor chip based on surface channel technology

Wouter Sparreboom; E.J. van der Wouden; Theodorus S.J. Lammerink; Joost Conrad Lötters

Truly calorimetric flow sensor chip based on surface channel technology

Wouter Sparreboom, E.J. van der Wouden, Theodorus S.J. Lammerink, Joost Conrad Lötters

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this paper we present a truly calorimetric flow sensor. The technology to fabricate the sensor is based on surface channel technology. The nominal measurable air flow is 0.8 mln/min. The material of the sensor element is silicon nitride which is resistant to most commonly applied chemicals. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This gives the tube an extremely low thermal mass which facilitates true calorimetric flow sensing. Calorimetric flow sensing allows for conversion between different gases based on their density and heat capacity product (Ͽ-Cp). This was checked experimentally for several common gases. Conversion between gases was found to be within 2%.

Original language	Undefined
Title of host publication	Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014
Place of Publication	Freiburg, Germany
Publisher	University of Freiburg
Pages	53-56
Number of pages	4
ISBN (Print)	not assigned
Publication status	Published - 8 Oct 2014
Event	2nd International Conference on MicroFluidic Handling Systems, MFHS 2014 - Freiburg, Germany Duration: 8 Oct 2014 → 10 Oct 2014 Conference number: 2 https://www.mfhs2014.uni-freiburg.de/conference

Publication series

Name
Publisher	University of Freiburg

Conference

Conference	2nd International Conference on MicroFluidic Handling Systems, MFHS 2014
Abbreviated title	MFHS
Country/Territory	Germany
City	Freiburg
Period	8/10/14 → 10/10/14
Internet address	https://www.mfhs2014.uni-freiburg.de/conference

Keywords

EWI-25459
METIS-309747
IR-93299

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Cite this

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title = "Truly calorimetric flow sensor chip based on surface channel technology",

abstract = "In this paper we present a truly calorimetric flow sensor. The technology to fabricate the sensor is based on surface channel technology. The nominal measurable air flow is 0.8 mln/min. The material of the sensor element is silicon nitride which is resistant to most commonly applied chemicals. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This gives the tube an extremely low thermal mass which facilitates true calorimetric flow sensing. Calorimetric flow sensing allows for conversion between different gases based on their density and heat capacity product (Ͽ-Cp). This was checked experimentally for several common gases. Conversion between gases was found to be within 2%.",

keywords = "EWI-25459, METIS-309747, IR-93299",

author = "Wouter Sparreboom and {van der Wouden}, E.J. and Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad}",

note = "http://www.mfhs2014.uni-freiburg.de/conference/proceedings; null ; Conference date: 08-10-2014 Through 10-10-2014",

year = "2014",

month = oct,

day = "8",

language = "Undefined",

isbn = "not assigned",

publisher = "University of Freiburg",

pages = "53--56",

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Sparreboom, W, van der Wouden, EJ, Lammerink, TSJ & Lötters, JC 2014, Truly calorimetric flow sensor chip based on surface channel technology. in Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. University of Freiburg, Freiburg, Germany, pp. 53-56, 2nd International Conference on MicroFluidic Handling Systems, MFHS 2014, Freiburg, Germany, 8/10/14.

Truly calorimetric flow sensor chip based on surface channel technology. / Sparreboom, Wouter; van der Wouden, E.J.; Lammerink, Theodorus S.J. et al.

Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014. Freiburg, Germany : University of Freiburg, 2014. p. 53-56.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Truly calorimetric flow sensor chip based on surface channel technology

AU - Sparreboom, Wouter

AU - van der Wouden, E.J.

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

N1 - Conference code: 2

PY - 2014/10/8

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N2 - In this paper we present a truly calorimetric flow sensor. The technology to fabricate the sensor is based on surface channel technology. The nominal measurable air flow is 0.8 mln/min. The material of the sensor element is silicon nitride which is resistant to most commonly applied chemicals. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This gives the tube an extremely low thermal mass which facilitates true calorimetric flow sensing. Calorimetric flow sensing allows for conversion between different gases based on their density and heat capacity product (Ͽ-Cp). This was checked experimentally for several common gases. Conversion between gases was found to be within 2%.

AB - In this paper we present a truly calorimetric flow sensor. The technology to fabricate the sensor is based on surface channel technology. The nominal measurable air flow is 0.8 mln/min. The material of the sensor element is silicon nitride which is resistant to most commonly applied chemicals. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This gives the tube an extremely low thermal mass which facilitates true calorimetric flow sensing. Calorimetric flow sensing allows for conversion between different gases based on their density and heat capacity product (Ͽ-Cp). This was checked experimentally for several common gases. Conversion between gases was found to be within 2%.

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KW - METIS-309747

KW - IR-93299

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EP - 56

BT - Proceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014

PB - University of Freiburg

CY - Freiburg, Germany

Y2 - 8 October 2014 through 10 October 2014

ER -