Truly calorimetric flow sensor chip based on surface channel technology

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    Abstract

    In this paper we present a truly calorimetric flow sensor. The technology to fabricate the sensor is based on surface channel technology. The nominal measurable air flow is 0.8 mln/min. The material of the sensor element is silicon nitride which is resistant to most commonly applied chemicals. The measurement tube is freely suspended and has a wall thickness of only 1 micron. This gives the tube an extremely low thermal mass which facilitates true calorimetric flow sensing. Calorimetric flow sensing allows for conversion between different gases based on their density and heat capacity product (Ͽ-Cp). This was checked experimentally for several common gases. Conversion between gases was found to be within 2%.
    Original languageUndefined
    Title of host publicationProceedings of the Second International Conference on MicroFluidic Handling Systems, MFHS 2014
    Place of PublicationFreiburg, Germany
    PublisherUniversity of Freiburg
    Pages53-56
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 8 Oct 2014
    Event2nd International Conference on MicroFluidic Handling Systems, MFHS 2014 - Freiburg, Germany
    Duration: 8 Oct 201410 Oct 2014
    Conference number: 2
    https://www.mfhs2014.uni-freiburg.de/conference

    Publication series

    Name
    PublisherUniversity of Freiburg

    Conference

    Conference2nd International Conference on MicroFluidic Handling Systems, MFHS 2014
    Abbreviated titleMFHS
    CountryGermany
    CityFreiburg
    Period8/10/1410/10/14
    Internet address

    Keywords

    • EWI-25459
    • METIS-309747
    • IR-93299

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