Tunable sensor response by voltage-control in biomimetic hair flow sensors

H. Droogendijk, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


    We report improvements in detection limit and responsivity of biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors mediates large (80% and more) voltage-controlled electro-mechanical amplification of the flow signal for frequencies below the sensor's resonance. Application of an AC-bias voltage proves that tunable filtering and selective gain up to 20 dB can be achieved. Further, the quality and reliability of low frequency flow measurements can be improved using an AC-bias voltage.
    Original languageUndefined
    Title of host publication1st International Conference on Microfluidic Handling Systems
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - Oct 2012
    Event1st International Conference on MicroFluidic Handling Systems, MFHS 2012 - Enschede, Netherlands
    Duration: 10 Oct 201212 Oct 2012
    Conference number: 1

    Publication series

    PublisherUniversity of Twente


    Conference1st International Conference on MicroFluidic Handling Systems, MFHS 2012
    Abbreviated titleMFHS
    Internet address


    • METIS-289734
    • IR-82016
    • Adaptation
    • Electrostatic spring softening
    • EWI-22368
    • Hair
    • Flow sensor
    • TST-Life like
    • Cricket

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