Abstract
We report improvements in detection limit and responsivity of biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors mediates large (80% and more) voltage-controlled electromechanical amplification of the flow signal for frequencies below the sensor's resonance. Application of an AC-bias voltage proves that tunable filtering and selective gain up to 20 dB can be achieved. Further, the quality and reliability of low frequency flow measurements can be improved using an AC-bias voltage.
Original language | Undefined |
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Number of pages | 2 |
Publication status | Published - Oct 2012 |
Event | ICT.OPEN 2012 - World Trace Center, Rotterdam, Netherlands Duration: 22 Oct 2012 → 23 Oct 2012 |
Conference
Conference | ICT.OPEN 2012 |
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Country/Territory | Netherlands |
City | Rotterdam |
Period | 22/10/12 → 23/10/12 |
Keywords
- Cricket
- EWI-22454
- Electrostatic spring softening
- TST-Life like
- IR-84147
- Flow sensor
- Hair