We present an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.
- TST-Life like
- Flow sensor
- Electrostatic spring softening
Droogendijk, H., Bruinink, C. M., Sanders, R. G. P., & Krijnen, G. J. M. (2013). Tunable sensor response by voltage-control in biomimetic hair flow sensors. Micromachines, 4(1), 116-127. https://doi.org/10.3390/mi4010116