Tunable sensor response by voltage-control in biomimetic hair flow sensors

H. Droogendijk, C.M. Bruinink, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

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    Abstract

    We present an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.
    Original languageUndefined
    Pages (from-to)116-127
    Number of pages12
    JournalMicromachines
    Volume4
    Issue number1
    DOIs
    Publication statusPublished - 19 Mar 2013

    Keywords

    • EWI-23211
    • TST-Life like
    • Flow sensor
    • Hair
    • Biomimetics
    • Electrostatic spring softening
    • METIS-296375
    • IR-85262
    • Cricket

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