Tungsten-siliconnitride medium for mega- to gigayear data storage

Jeroen de Vries, Leon Abelmann, Andreas Manz, Michael Curt Elwenspoek

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    Abstract

    Throughout the ages humanity has stored data in order to preserve important information for generations to come. As the years have progressed the amount of data that can be stored efficiently has increased tremendously, the lifespan of this type of data storage however is severely limited. Within this paper we investigate the possibility to store data by encapsulating W in a SiN matrix.We show that using accelerated thermal aging the possible lifespan of this medium can be investigated and expected to reach well into the millions of years, preserving data for thousands of future generations. The first steps into fabrication of such a medium are discussed.
    Original languageUndefined
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente, Transducers Science and Technology
    Pages261-264
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    Name
    PublisherUniversity of Twente, Transducers Science and Technology (TST)

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • METIS-271148
    • Gigayear data storage
    • IR-74827
    • TST-SMI: Formerly in EWI-SMI
    • Human Document Project
    • EWI-18878
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Silicon nitride

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