Tungsten-siliconnitride medium for Mega- to Gigayear data storage

Jeroen de Vries, Leon Abelmann, A Manz, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


    Although the amount of data that can be stored has tremendously increased over the last decennia the longevity of the data is severely limited. If we want to store data for multiple human generations or even much longer we need a different type of storage system. In this paper we present a possible solution to store information about the human race for timescales of 1 million years or even longer. A first attempt is made where tungsten is encapsulated in a Si3N4 matrix. We show how accelerated thermal aging can be used to investigate the possible lifespan of this medium. The fabrication of the medium is discussed within this paper.
    Original languageUndefined
    Title of host publicationProceedings of the 23rd Micromechanics and Microsystems Europe Workshop, MME 2012
    PublisherIlmenau University of Technology
    Number of pages4
    ISBN (Print)978-3-938843-71-0
    Publication statusPublished - 19 Aug 2012
    Event23rd Micromechanics and Microsystems Europe Workshop, MME 2012 - Ilmenau, Germany
    Duration: 9 Sep 201212 Sep 2012
    Conference number: 23

    Publication series

    PublisherIlmenau University of Technology


    Workshop23rd Micromechanics and Microsystems Europe Workshop, MME 2012
    Abbreviated titleMME


    • TST-SMI: Formerly in EWI-SMI
    • EWI-22497
    • IR-82157
    • METIS-296139

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