Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever

S.M. Abdulla, L.J. Kauppinen, M. Dijkstra, M.J. de Boer, E. Berenschot, H.V. Jansen, R.M. de Ridder, G.J.M. Krijnen

    Research output: Contribution to journal › Article › Academic › peer-review

    35 Citations (Scopus)
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