Abstract
The turn-on speed of nMOS transistors (nMOST) is of paramount importance for robust Charged Device Model (CDM) protection circuitry. In this paper the nMOST turn-on time has been measured for the first time in the sub-halve nanosecond range with a commercial e-beam tester. The method may be used to improve CDM-ESD hardness by investigating the CDM pulse responses within circuit. Furthermore it is shown that the CDM results of various protection layouts can be simulated with a SPICE model.
| Original language | English |
|---|---|
| Pages (from-to) | 1735-1738 |
| Journal | Microelectronics reliability |
| Volume | 36 |
| Issue number | 11/12 |
| DOIs | |
| Publication status | Published - 1996 |
| Event | 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, ESREF 1996 - University of Twente, Enschede, Netherlands Duration: 8 Oct 1996 → 11 Oct 1996 Conference number: 7 |
Keywords
- METIS-111996
- IR-15124
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