Abstract
This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom.
Original language | English |
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Pages (from-to) | 644-648 |
Number of pages | 5 |
Journal | Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment |
Volume | 610 |
Issue number | 3 |
DOIs | |
Publication status | Published - 11 Nov 2009 |
Keywords
- Radiation detectors
- SU-8
- MICROMEGAS
- SC-RID: Radiation Imaging detectors
- CMOS post-processing
- GEM
- Microsystems
- MPGD
- Proportional chambers
- Above IC
- 2023 OA procedure