Twingrid: a wafer post-processed multistage micro patterned gaseous detector

Y. Bilevych, Y. Bilevych, V.M. Blanco Carballo, M.A. Chefdeville, M. Fransen, H. van der Graaf, Cora Salm, Jurriaan Schmitz, J. Timmermans, J. Timmermans

    Research output: Contribution to journalArticleAcademicpeer-review

    10 Citations (Scopus)


    This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom.
    Original languageUndefined
    Article number10.1016/j.nima.2009.09.054
    Pages (from-to)644-648
    Number of pages5
    JournalNuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
    Issue number3
    Publication statusPublished - 11 Nov 2009


    • Radiation detectors
    • METIS-264064
    • SU-8
    • SC-RID: Radiation Imaging detectors
    • CMOS post-processing
    • GEM
    • Microsystems
    • IR-68647
    • MPGD
    • Proportional chambers
    • EWI-16150
    • Above IC

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