Twingrid: a wafer post-processed multistage micro patterned gaseous detector

Y. Bilevych, V.M. Blanco Carballo, M.A. Chefdeville, M. Fransen, H. van der Graaf, Cora Salm, Jurriaan Schmitz, J. Timmermans

    Research output: Contribution to journalArticleAcademicpeer-review

    10 Citations (Scopus)


    This paper presents a new multistage Micro Patterned Gaseous Detector (MPGD) made by wafer post-processing. The device consists of a double metal grid supported by SU-8 structures on top of a Timepix chip. The detector has been operated with He/iC4H10 and Ar/iC4H10 gas mixtures. Cosmic rays as well as 55Fe decay events have been recorded using the Timepix chip in 2D and 3D readout modes. The detector can be operated like a Micromegas (high field close to the chip) or like a GEM (amplification stage followed by a low extraction field). This approach for manufacturing GEM-like radiation imaging detectors allows for precise dimensional control and considerable geometrical design freedom.
    Original languageEnglish
    Article number10.1016/j.nima.2009.09.054
    Pages (from-to)644-648
    Number of pages5
    JournalNuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
    Issue number3
    Publication statusPublished - 11 Nov 2009


    • Radiation detectors
    • METIS-264064
    • SU-8
    • SC-RID: Radiation Imaging detectors
    • CMOS post-processing
    • GEM
    • Microsystems
    • IR-68647
    • MPGD
    • Proportional chambers
    • EWI-16150
    • Above IC


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