Two-dimensional oxide based pressure sensors with high sensitivity

Hao Liu; Bo Feng; Xiaosong Bai; Tianhang Qi; Zhiyong Wei; Ruichao Liu; Keke Yin; Jinxing Gao; Daoyuan Yang; Guangchao Zheng; J.E. ten Elshof; Chongxin Shan; Qi-Jun Sun; Huiyu Yuan

doi:10.1002/nano.202100053

Two-dimensional oxide based pressure sensors with high sensitivity

Hao Liu, Bo Feng, Xiaosong Bai, Tianhang Qi, Zhiyong Wei, Ruichao Liu, Keke Yin, Jinxing Gao, Daoyuan Yang, Guangchao Zheng, J.E. ten Elshof, Chongxin Shan, Qi-Jun Sun, Huiyu Yuan^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

Nanomaterials based pressure sensors have obtained world-wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e-skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e-skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two-dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 106 kPa–1, which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure-sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors.

Original language	English
Pages (from-to)	51-59
Journal	Nano Select
Volume	3
Issue number	1
Early online date	11 May 2021
DOIs	https://doi.org/10.1002/nano.202100053
Publication status	Published - Jan 2022

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title = "Two-dimensional oxide based pressure sensors with high sensitivity",

abstract = "Nanomaterials based pressure sensors have obtained world-wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e-skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e-skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two-dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 106 kPa–1, which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure-sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors.",

author = "Hao Liu and Bo Feng and Xiaosong Bai and Tianhang Qi and Zhiyong Wei and Ruichao Liu and Keke Yin and Jinxing Gao and Daoyuan Yang and Guangchao Zheng and {ten Elshof}, J.E. and Chongxin Shan and Qi-Jun Sun and Huiyu Yuan",

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AU - Liu, Hao

AU - Feng, Bo

AU - Bai, Xiaosong

AU - Qi, Tianhang

AU - Wei, Zhiyong

AU - Liu, Ruichao

AU - Yin, Keke

AU - Gao, Jinxing

AU - Yang, Daoyuan

AU - Zheng, Guangchao

AU - ten Elshof, J.E.

AU - Shan, Chongxin

AU - Sun, Qi-Jun

AU - Yuan, Huiyu

PY - 2022/1

Y1 - 2022/1

N2 - Nanomaterials based pressure sensors have obtained world-wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e-skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e-skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two-dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 106 kPa–1, which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure-sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors.

AB - Nanomaterials based pressure sensors have obtained world-wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e-skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e-skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two-dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 106 kPa–1, which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure-sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors.

U2 - 10.1002/nano.202100053

DO - 10.1002/nano.202100053

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SN - 2688-4011

VL - 3

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EP - 59

JO - Nano Select

JF - Nano Select

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Two-dimensional oxide based pressure sensors with high sensitivity

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