Two-dimensional oxide based pressure sensors with high sensitivity

Hao Liu, Bo Feng, Xiaosong Bai, Tianhang Qi, Zhiyong Wei, Ruichao Liu, Keke Yin, Jinxing Gao, Daoyuan Yang, Guangchao Zheng, J.E. ten Elshof, Chongxin Shan, Qi-Jun Sun, Huiyu Yuan*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Nanomaterials based pressure sensors have obtained world-wide research interest due to their promising potential applications in health monitoring, artificial intelligence, and electronic skin (e-skin). Despite the recent progress in sensitivity and detection range of the pressure sensors, the relatively high thickness of the active films has obstructed their applications for e-skin and degraded the comfortability as wearable devices. We hereby report for the first time a novel pressure sensor based on two-dimensional metal oxide nanosheets where the gaps between neighboring nanosheets are adjustable. The pressure sensors show a sensitivity of up to 7.2 × 106 kPa–1, which is the highest value ever reported for a pressure sensor. Additionally, the sensor shows good repeatability and excellent stability. The pressure-sensing ranges can be tuned by adjusting the coverage of the nanosheet film. This work presents an effective strategy to develop ultrathin pressure sensors.
Original languageEnglish
Pages (from-to)51-59
JournalNano Select
Volume3
Issue number1
Early online date11 May 2021
DOIs
Publication statusPublished - Jan 2022

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