Two-dimensional periodic arrays of deep nanopores etched in silicon with reactive ions

L.A. Woldering, R.W. Tjerkstra, Henricus V. Jansen, I.D. Setija, Willem L. Vos

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 16 Nov 2006
EventNanoNed/MicroNed Symposium II 2006 - Eindhoven University of Technology, Eindhoven, Netherlands
Duration: 16 Nov 200617 Nov 2006

Conference

ConferenceNanoNed/MicroNed Symposium II 2006
CountryNetherlands
CityEindhoven
Period16/11/0617/11/06

Keywords

  • METIS-233414

Cite this

Woldering, L. A., Tjerkstra, R. W., Jansen, H. V., Setija, I. D., & Vos, W. L. (2006). Two-dimensional periodic arrays of deep nanopores etched in silicon with reactive ions. -. Poster session presented at NanoNed/MicroNed Symposium II 2006, Eindhoven, Netherlands.